Waferpedia

Comparison ledger

0010-16392 ESC AssemblyversusTE 8500 SATC

Applied Materials 0010-16392 ESC Assembly, Tokyo Electron TE 8500 SATC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
TE 8500 SATCTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyTokyo Electron TE 8500 SATC
Cited variants—
  • TE 8500 (S)ATC[1]
Specifications
OEMApplied Materials[2]Tokyo Electron[4]
Model0010-16392[2]TE 8500 SATC[4]
TypeESC Assembly[2]Etcher[4]
Wafer Size300 mm[3]—
Electrode ConfigurationDual[3]—
Vintage—1997[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]spwindustrial.comspwindustrial.com
  4. [4]Equipment inventory listing