Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Oxford Instruments Plasmalab 100 ICP 180 RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Plasmalab 100 ICP 180 RIEOxford Instruments |
|---|---|---|
| OEM | Applied Materials | Oxford Instruments |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Oxford Instruments Plasmalab 100 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | Plasmalab 100 ICP 180[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Voltage | — | 208V, 50/60Hz[3] |
| Configuration | — | With VAT PM-5 Adaptive Pressure Controller[3] |
| Manufacturer | — | Oxford Instruments[3] |
| Tool type | — | Reactive Ion Etcher[3] |
| Category | — | Etch[4] |
| Wafer size | — | 6 inch[3] |
| Power | — | 208V, 50/60Hz[3] |
| Adaptive pressure controller | — | VAT PM-5[3] |
| Turbopump controller | — | Adixen ACT 1300M[3] |
| Vacuum pump | — | Leybold D65BCS with oil filter and exhaust filter[3] |
| Gas delivery | — | Gas Box[3] |
| Control computer | — | Control Computer (no HDD)[3] |
| Monitor | — | LCD Monitor[3] |
| Chiller | — | Thermo Neslab Chiller[3] |
| Computer cart | — | Computer Cart[3] |
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