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Zygo

Newview 5000 Optical

Metrology & InspectionZygo Newview family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Newview 5000 Optical — Inventory photo
Fig. 01Newview 5000 OpticalInventory photo[1]

What it is

The Zygo Newview 5000 Optical is an optical profilometer used for metrology and inspection.[1][4]

The Zygo Newview 5000 is a non-contact three-dimensional surface profiler for measuring surface microstructure and topography.[2][5]

How it works

The NewView 5000 uses scanning white light interferometry to image and measure surface topography in three dimensions.[2][5]

The instrument forms graphic images and numerical measurements from interference fringes while the sample is scanned through focus.[3][2]

The instrument supports opaque and transparent surfaces, and it can analyze surface texture, step height, and related topography features without sample contact.[2][6]

Where it fits in the process flow

The instrument is used to evaluate surface structure, step heights, and critical dimensions for process control and product qualification.[6][2]

Applications

The Newview 5000 is used for surface texture measurement, three-dimensional surface profiling, and numerical surface characterization.[6][2]

What do the numbers mean?

Optics & imaging8

Lens
x50[1]
Accurate?
Instrument type
Optical profilometer[1]
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Objectives
5x, 10x, 50x[2]
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Vertical resolution
0.1-20nm[2]
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Lateral resolution range
0.64–2.6μm[2]
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Working distance at 5x objective
9.3mm[3]
Accurate?
Working distance at 10x objective
7.4mm[3]
Accurate?
Working distance at 50x objective
3.4mm[3]
Accurate?

Control & software1

Control system
Windows NT[1]
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Dimensions & facilities1

Maximum vertical step height
5mm[2]
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Configuration & options11

Motorized Stage
X, Y Only[1]
Accurate?
Windows NT[1]
Accurate?
Measurement type
Non-contact 3D surface profiler[2]
Accurate?
Measurement technique
Scanning white light interferometry[2]
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Stage
Motorized X/Y stage[1]
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Vertical scan rate
≤ 10μm/sec[2]
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Sample types
Opaque and transparent surfaces[2]
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Maximum roughness
≤ 100μm Rp[2]
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Reflectivity
4-100%[2]
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Maximum sample thickness
104mm[2]
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Extended scan length
Up to 5000um[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What measurement method does the Zygo Newview 5000 use?

The Zygo Newview 5000 uses scanning white light interferometry.[2][5]

What kinds of surfaces can the system measure?

The system can measure opaque and transparent surfaces.[2][5]

Not publicly documented

The following facts about the Newview 5000 Optical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Newview 5000 Optical are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Newview 5000 Optical are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Newview 5000 Optical are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Newview 5000 Optical are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Newview 5000 Optical is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]ssel-sched.eecs.umich.edu — ssel-sched.eecs.umich.edussel-sched.eecs.umich.edu
  3. [3]ssel-sched.eecs.umich.edu — ssel-sched.eecs.umich.edussel-sched.eecs.umich.edu
  4. [4]Newview 5000 Optical — Zygo | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  5. [5]White light interferometer ZYGO NewView 5000 — nsc.gpi.runsc.gpi.ru
  6. [6]NewView 5000 — machinetoolsonline.commachinetoolsonline.com
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Last updated Oct 6, 2026.

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