Zeiss
CrossBeam 550
The Zeiss CrossBeam 550 is a scanning electron microscope (SEM) used for imaging and metrology. The CrossBeam 550 is composed of a GEMINI II column and a 5-axes motorized stage. The CrossBeam 550 detects secondary electrons and backscattered electrons for high-resolution imaging.[1]
Plate 01ZEISS Crossbeam 550: Your FIB-SEM for High Throughput 3D Analysis and Sample Preparation
ZEISS MicroscopyWatch on YouTubePlate 02ISTFA Tools of the Trade 2024: ZEISS Crossbeam 550 Samplefab
ASM InternationalWatch on YouTubePlate 03Zeiss Crossbeam 550 SEM Basic Training
Allen HunterWatch on YouTube
Wafer size
6"
Power
20 kV (with beam booster)[1]
Optics
GEMINI II electron optical column[1]
Control era
Windows
What it is
The Zeiss CrossBeam 550 is a scanning electron microscope (SEM) system. The system features a GEMINI II electron column, a specimen chamber with a five-axis motorized stage, and a semi-automatic airlock. The system is mounted on active suspensions for vibration compensation. The SEM is controlled by Zeiss SmartSEM software via a graphical user interface. A dual joystick is used for stage control and specimen navigation.[1]
How it works
The GEMINI II column uses a Schottky field emitter as the electron gun. Electrons are accelerated by the acceleration voltage and pass through a beam booster that maintains high electron energy to reduce sensitivity to stray fields. The objective lens consists of an electrostatic/electromagnetic lens doublet. The system includes multiple detectors: an InLens secondary electron (SE) detector, an EsB detector for energy-selective backscattered electrons, an annular backscatter detector (aBSD), and a variable pressure secondary electron (VPSE) detector. The aBSD provides high-contrast imaging of composition, density, and surface topography. The VPSE detector enables observation of non-conductive specimens without extensive sample preparation.[1]
Where it fits in the process flow
The CrossBeam 550 is reserved for imaging dedicated to the control of processes performed in the cleanroom facility. The system is equipped with automated metrology software such as InSPEC for critical dimension measurement. Offline analysis and metrology are available with ProSEM and MountainsMap software.[1]
Applications
The system is used for high-resolution imaging of specimens in materials science and nanotechnology. The aBSD detector allows visualization of composition, density, and surface topography contrasts. The VPSE detector allows imaging of non-conductive specimens. The system also supports automated metrology and offline analysis.[1]
- Imaging dedicated to process control
- Offline analysis and metrology
- High-resolution SE imaging
- Topography imaging
- Material contrast imaging
- Compositional contrast examinations
- Non-conductive sample imaging
- Angle-selective material characterization
- BSE imaging
Why won't it start?
Documented failure modes, common issues, and field considerations.
- The tool is exclusively reserved for imaging dedicated to process control by regular CMi users.
- Penalty charges apply for unused booking, late cancellations, and mismatch between booked name and operator name.
What do the numbers mean?
Power & electrical3
Vacuum & pumping2
- VPSE detector
- Variable Pressure Secondary Electron detector for imaging non-conductive specimens under variable pressure without extensive sample preparation[1]
Wafer handling6
- Sample holders
- Carousel 9x10mm, multi-pin holder, Wafer Section, 4 Inch Wafer, 6 Inch Wafer, 6 Inch Mask[1]
- Specimen holders
- Carousel 9x10mm, multi-pin holder, Wafer Section, 4 Inch Wafer, 6 Inch Wafer, 6 Inch Mask[1]
- Sample holders
- Carousel 9x10mm, multi-pin holder, wafer section (cleaved samples), 4 inch wafer, 6 inch wafer, 6 inch mask[1]
- Specimen holders
- Carousel 9x10mm, multi-pin holder, wafer section (cleaved samples), 4 inch wafer, 6 inch wafer, 6 inch mask[1]
Optics & imaging14
- Detectors
- InLens SE Detector, SE Detector (Everhart-Thornley type), EsB Detector, aBSD Detector (annular BackScattered electron detector), VPSE Detector[1]
- aBSD detector
- Pneumatically retractable annular backscattered electron detector with five separate diode segments (one inner concentric ring, four outer quadrants)[1]
- EsB detector
- Energy-selective backscattered detector enabling SE and BSE detection; annular shaped in-column detector located above the InLens SE detector[1]
- Chamber cameras
- Chamber CCD camera at backside plus a second CCD camera on the left-hand side of the specimen chamber[1]
Control & software9
- Control interface
- Controlled via a dual joystick and a dedicated control panel; PC with two monitors[1]
- Available software for offline analysis and metrology
- ProSEM software, MountainsMap 8.2 (coupled to 3DSM Metrology), SmartStitch[1]
- Reserved use
- Exclusively reserved for imaging dedicated to control of processes done in CMi by regular CMi users[1]
- Control interface
- Dual joystick for stage control and specimen navigation, plus main keyboard control panel for direct access to 14 frequently used functions[1]
- Software
- Zeiss SmartSEM control software; offline analysis and metrology with ProSEM, MountainsMap 8.2 (coupled to 3DSM Metrology), SmartStitch; automated metrology via InSPEC[1]
Configuration & options16
- Vibration isolation
- Set of active suspensions for vibration compensation (always activated)[1]
Vintage & configurations
Control-system eraWindows[1]
What replaced it?
Related models
- siblingZeiss Merlin— The basic training notes differences between the SEM Crossbeam and SEM MERLIN, and state that being fully trained on SEM MERLIN is a prerequisite.source[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Maximum acceleration voltage20 kV (with beam booster)[1]
- AirlockSemi-automatic airlock for fast specimen transfer and fast pumping times[1]
- VPSE detectorVariable Pressure Secondary Electron detector for imaging non-conductive specimens under variable pressure without extensive sample preparation[1]
- SE detectorEverhart-Thornley type detector; collector voltage variable between -250 V and +400 V[1]
- Beam boosterBooster voltage always at high potential when acceleration voltage is 20 kV or less[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of electron source does the CrossBeam 550 use?
The CrossBeam 550 uses a Schottky field emitter as the electron gun.[1]
How many axes does the motorized stage have?
The motorized stage has five axes: X, Y, Z, tilt, and rotation.[1]
What software is used for automated metrology?
The InSPEC software is used for automated metrology on the CrossBeam 550.[1]
What detectors are available for imaging non-conductive specimens?
The variable pressure secondary electron (VPSE) detector enables imaging of non-conductive specimens without extensive sample preparation.[1]
What is the name of the control software for the CrossBeam 550?
The CrossBeam 550 is controlled by Zeiss SmartSEM software.[1]
Not publicly documented
The following facts about the CrossBeam 550 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CrossBeam 550 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CrossBeam 550 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The process node or technology generation of the CrossBeam 550 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the CrossBeam 550 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the CrossBeam 550 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
Last updated Oct 8, 2026.
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