Zeiss
Axiotron 300
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Zeiss Axiotron 300 is an automated optical inspection microscope designed for wafer inspection and review. The Zeiss Axiotron 300 supports 200 mm and 300 mm wafer sizes. The Zeiss Axiotron 300 is configured for brightfield, darkfield, and DIC (Nomarski) observation.[1]
How it works
The Axiotron 300 employs optical microscopy techniques including brightfield (visible and 337 nm ultraviolet), darkfield, and differential interference contrast (DIC, Nomarski) observation. A programmed contrast and illumination mode system (CSM) controls light, aperture, zoom, field stop, and DIC analyzer settings.[1]
Illumination is provided by a mercury-xenon (Hg-Xe) lamp source through an MEG system and a Zeiss LG-Xe 180 W remote xenon source. A Thermo VSL-337ND-S 337 nm nitrogen laser and Photonic Instruments Micro-Point 2202/2279 assembly are integrated for specific inspection modes. A Zeiss dual-beam laser autofocus (AF) assembly maintains focus.[1]
The system includes a Newport Kensington XY stage with 300 mm x 300 mm travel and a 300 mm vacuum wafer chuck. Objectives available include Epiplan Neofluar 10x/0.30 HD DIC, Epiplan Apochromat 50x/0.90 HD DIC, 100x/0.95 HD DIC, 150x/0.95, and Epiplan UV Insp 120x/0.95. Two cameras are fitted: a TI MP-2000PF-U5 and an Optronix S97670 with DEI-750D controller. Active vibration isolation is provided by a Halcyonics (Accurian) MOD-2M controller. The system runs on MS Windows 2000 Professional and is CE marked.[1]
What do the numbers mean?
Vacuum & pumping1
Wafer handling3
Optics & imaging6
- Objectives (partial list)
- Epiplan Neofluar 10x/0.30 HD DIC, Epiplan Apochromat 50x/0.90 HD DIC, 100x/0.95 HD DIC, 150x/0.95, Epiplan UV Insp 120x/0.95[1]
Control & software2
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Axiotron 300 AOI | — | — | — | waferpedia.com[4] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- StageNewport Kensington XY stage, 300 mm x 300 mm travel, 300 mm vacuum wafer chuck[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Zeiss Axiotron 300 support?
The Axiotron 300 supports 12-inch (300mm) wafers and is also configured for 200mm wafer size.[2][1]
What illumination sources are used in the Axiotron 300?
The Axiotron 300 uses a Zeiss LG-Xe 180W remote xenon illumination source, a Hg-Xe lamp, and a Thermo VSL-337ND-S 337nm nitrogen laser for ultraviolet inspection.[1]
What objectives are available for the Axiotron 300?
The Axiotron 300 uses Zeiss Epiplan objectives: 10x/0.30 HD DIC, 50x/0.90 HD DIC, 100x/0.95 HD DIC, 150x/0.95, and a UV Insp 120x/0.95 objective.[1]
Does the Axiotron 300 have an autofocus system?
Yes, the Axiotron 300 includes a Zeiss 45 74 92 dual beam laser autofocus assembly.[1]
What type of stage does the Axiotron 300 use?
The Axiotron 300 uses a Newport Kensington XY stage with 300mm x 300mm travel and a 300mm vacuum wafer chuck.[1]
Not publicly documented
The following facts about the Axiotron 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Axiotron 300 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Axiotron 300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Axiotron 300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Axiotron 300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Axiotron 300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]tarasemi.com — tarasemi.comtarasemi.com
- [2]Equipment inventory listing
- [3]wotol.com — wotol.comwotol.com
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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