Waferpedia

Yaskawa

XU RSM 5301 Robot

Yaskawa XU RSM 5301 Robot family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Yaskawa XU RSM 5301 Robot is an industrial robot manufactured by Yaskawa. The Yaskawa XU RSM 5301 Robot has a vintage year of 2001.[1][2]

XU RSM 5301 Robot — Inventory photo
Fig. 01XU RSM 5301 RobotInventory photo[1]

What it is

The Yaskawa XU RSM 5301 Robot is a Yaskawa industrial robot identified by the model name XU RSM 5301.[1][2][3]

What do the numbers mean?

Wafer handling1

Type
Robot[2]
Accurate?

Configuration & options3

Make
Yaskawa[1]
Accurate?
Model
XU RSM 5301[1]
Accurate?
Vintage
2001[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Who manufactures the XU RSM 5301 Robot?

The Yaskawa XU RSM 5301 Robot is manufactured by Yaskawa.[1][2][3]

What is the model number of this robot?

The model number is XU RSM 5301 (also written as XU-RSM5301).[1][2][3]

Not publicly documented

The following facts about the XU RSM 5301 Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XU RSM 5301 Robot are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XU RSM 5301 Robot are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XU RSM 5301 Robot are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XU RSM 5301 Robot are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XU RSM 5301 Robot is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Yaskawa XU-RSM5301 - RESER Robot Technology — reser.nlreser.nl
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Last updated Oct 8, 2026.

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