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Woollam

M-2000D

Spectroscopic ellipsometer8 in (190-1600 nm)Woollam M-2000D family
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WoollamM-2000D
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What it is

The Woollam M-2000D is a spectroscopic ellipsometer.[1][2]

The M-2000D is a fully automated measurement tool for optical characterization.[1][2]

How it works

The M-2000D measures the optical properties of thin film semiconductor materials and reports the complex refractive index or dielectric function.[1][2]

The M-2000D has mapping functionality and a variable incidence angle.[1][2]

Where it fits in the process flow

The M-2000D is used to evaluate thin film semiconductor materials after film formation and before later process decisions that depend on optical properties.[1][2]

Applications

The M-2000D measures the optical properties of thin film semiconductor materials.[1][2]

The M-2000D is used to determine the complex refractive index or dielectric function.[1][2]

  • Optical properties of thin film semiconductor materials

What do the numbers mean?

Wafer handling1

Wafer size
8 in (190-1600 nm)[1]
Accurate?

Optics & imaging1

Measurement application
Measures optical properties of thin film semiconductor materials[1]
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Configuration & options9

OEM
J.A. Woollam[1]
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Model
M-2000D[1]
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Category
Spectroscopic ellipsometer[1]
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Mode
Horizontal mode[1]2 sources
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Mode option
Vertical mode available by check with John Abrahams[1]2 sources
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Automation
Fully automated measurement tool[1]2 sources
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Functionality
Mapping functionality[1]2 sources
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Incidence angle
Can be varied; typical measurements are made from 60 to 85[1]2 sources
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Measured properties
Complex refractive index or dielectric function[1]2 sources
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What does the M-2000D measure?

The M-2000D measures the optical properties of thin film semiconductor materials.[1][2]

What optical quantities can the M-2000D report?

The M-2000D can report the complex refractive index or dielectric function.[1][2]

Does the M-2000D support mapping?

The M-2000D has mapping functionality.[1][2]

Can the incidence angle be changed on the M-2000D?

The incidence angle can be varied on the M-2000D.[1][2]

What measurement mode is used on the M-2000D?

The M-2000D is used in horizontal mode, and vertical mode is available with staff guidance.[1][2]

Not publicly documented

The following facts about the M-2000D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M-2000D are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the M-2000D are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the M-2000D are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the M-2000D are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the M-2000D is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]nanocenter.umd.edu — nanocenter.umd.edunanocenter.umd.edu
  2. [2]M-2000D — Woollam | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.