Tokyo Electron

Clean Track Mark 8 Track

Wet Processing / Clean Tokyo Electron Clean Track family

Research Quality: 30% complete

Clean Track Mark 8 Track — Inventory photo — Fig. 01Clean Track Mark 8 TrackInventory photo^[1]

What is it?

The Tokyo Electron Clean Track Mark 8 Track is a coater/developer track system for wet processing in semiconductor manufacturing.

What do the numbers mean?

Wafer handling1

Indexer: 2 Block Normal Cassette^[1]

Gas & chemistry2

Developer (2)^[1]
Developer: 2^[1]

Configuration & options16

Panasonic Main Arm Motor^[1]; Coater (1)^[1]; ADH (1)^[1]; Hot (8 each)^[1]; Cool (3 each)^[1]; WDS (1)^[1]
Panasonic Main Arm Motor: Included^[1]
Coater: 1^[1]
ADH: 1^[1]
Hot Plates: 8 each^[1]
Cool Plates: 3 each^[1]
WDS: 1^[1]
Vintage: 1994^[1]
Manufacturer: Tokyo Electron^[1]
Model: Clean Track Mark 8^[1]
Category: Wet Processing / Clean^[4]

Vintage & configurations

1994Manufacturing vintage^[1]
System vintage year

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationDeveloper (2)^[1]
Developer2^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of cassette handling does the system use?

The system uses an indexer configured as a two-block normal cassette unit.^[1]^[4]

What type of main arm motor does the Mark 8 use?

The Mark 8 is equipped with a Panasonic main arm motor.^[1]^[4]

Not publicly documented

The following facts about the Clean Track Mark 8 Track are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the Clean Track Mark 8 Track are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Clean Track Mark 8 Track are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Clean Track Mark 8 Track are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Clean Track Mark 8 Track is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Clean Track Mark 8 Track are on record.
Answerable by: an OEM parts catalog or a service engineer