Tokyo Electron
Clean Track Act 12
The Tokyo Electron Clean Track Act 12 is a coater/developer system used in semiconductor wafer processing. The Clean Track Act 12 is available in a single-block configuration with two coating units and two developing units. The Clean Track Act 12 can be equipped with temperature and humidity controlled air supply systems such as the Shinwa T&H ESA-8-F-02.[1][2]
How it works
A coater/developer applies light-sensitive resist to a wafer and develops the exposed resist after lithographic exposure. The class of machine supports the coating and developing steps used to form photoresist patterns that define later wafer processing. The Clean Track platform is a track system built around the resist coat and develop sequence.[6]
Applications
The Clean Track Act 12 is used for photoresist coating and developing in semiconductor lithography. The coater/developer class also supports spin-on-dielectric processing with in-line cure processing.[6]
What do the numbers mean?
Power & electrical7
- Power Box Model PB121-I150-YA-L1T, 200-200V/ 3ph/ 50~60Hz,[2]
- SMC Thermo-Con Model INR-244-265A-3004-X17 Recirculating Temperature Controller, 200V/3ph/60Hz[2]
- PolyScience DuraChill Model DCA304D1 Recirculating Temperature Controller, 200-230V/3ph/50-60Hz[2]
- Shinwa Model T&H-ESA-2S-T-01 Temperature and Humidity Controlled Air Supply System, 200-230V/3ph/50-60Hz[2]
- Recirculating temperature controller
- SMC Thermo-Con Model INR-244-265A-3004-X17, 200V/3ph/60Hz; PolyScience DuraChill Model DCA304D1, 200-230V/3ph/50-60Hz[2]
Gas & chemistry5
Configuration & options12
- Single Block[1]
- Shinwa ESA CFCP-8-00[1]
- Shinwa T&H ESA-8-F-02 Temperature and Humidity Controlled Air Supply System[1]
- With:[2]
- Associated air supply system
- Shinwa T&H ESA-8-F-02 Temperature and Humidity Controlled Air Supply System[1]
- Associated temperature and humidity controlled air supply system
- Shinwa Model T&H-ESA-2S-T-01 Temperature and Humidity Controlled Air Supply System[2]
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration2 Coating units and 2 Developers[1]
- ConfigurationPower Box Model PB121-I150-YA-L1T, 200-200V/ 3ph/ 50~60Hz,[2]
- Configuration2-Door Stainless Steel Solvent Distribution Station Complete with:[2]
- ConfigurationSMC Thermo-Con Model INR-244-265A-3004-X17 Recirculating Temperature Controller, 200V/3ph/60Hz[2]
- ConfigurationPolyScience DuraChill Model DCA304D1 Recirculating Temperature Controller, 200-230V/3ph/50-60Hz[2]
- ConfigurationShinwa Model T&H-ESA-2S-T-01 Temperature and Humidity Controlled Air Supply System, 200-230V/3ph/50-60Hz[2]
- Power box modelPB121-I150-YA-L1T, 200-200V/3ph/50~60Hz[2]
- Solvent distribution station2-Door Stainless Steel[2]
- Recirculating temperature controllerSMC Thermo-Con Model INR-244-265A-3004-X17, 200V/3ph/60Hz; PolyScience DuraChill Model DCA304D1, 200-230V/3ph/50-60Hz[2]
- Air supply systemShinwa Model T&H-ESA-2S-T-01, 200-230V/3ph/50-60Hz[2]
- Equipment typeCoater / Developer[1]
- Developers2[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Clean Track Act 12?
The Clean Track Act 12 is a coater/developer for semiconductor photolithography.[6][1][2]
What process steps does the Clean Track Act 12 support?
The Clean Track Act 12 supports resist coating and resist developing.[6]
Not publicly documented
The following facts about the Clean Track Act 12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Clean Track Act 12 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Clean Track Act 12 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Clean Track Act 12 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Clean Track Act 12 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Clean Track Act 12 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]web.archive.org — tel.com (Apr 15, 2012)web.archive.org
Last updated Oct 3, 2026.
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