Tegal
The Tegal 901ACS is a wide-gap diode reactor system. The Tegal 901ACS is suited for low-temperature plasma etch operations. The Tegal 901ACS can etch features down to 1 micron.[1]
Wafer size
75 mm, 100 mm, 125 mm, and 150 mm diameter wafers; 4-inch square wafers
Node / era
1 micron
The Tegal 901ACS is a reactive ion etching system for semiconductor processing.[1]
The Tegal 901ACS is a wide-gap diode reactor system.[1]
The Tegal 901ACS is used for non-critical etching operations and for photoresist trimming.[1]
The Tegal 901ACS is suited for semiconductor processing of silicon, gallium-arsenide, indium-phosphide, and silicon-germanium substrates.[1]
The Tegal 901ACS can plasma etch silicon dioxide, silicon nitride, and silicon carbide.[1]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Tegal 903ACS | — | — | Narrow gap diode reactor system; ideal for tightly-controlled, anisotropic etching of silicon dioxide and silicon nitride insulating layers. | plasmatherm.com[1] |
| Tegal 981ACS | — | — | Scaled-up version of the 901ACS; built to handle 150 mm and 200 mm diameter wafers, 100 mm square wafers, and 6-inch square wafers. | plasmatherm.com[1] |
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The following facts about the 901ACS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 901ACS are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 901ACS are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 901ACS are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the 901ACS are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 901ACS are on record.
Answerable by: university cleanroom staff or an OEM application specialist
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Last updated Oct 3, 2026.
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