SUSS MicroTec
PM5
The SUSS PM5 is an analytical probe system for precise analysis of devices fabricated on wafers and substrates up to 150 mm. The SUSS PM5 can be used for DC and HF measurements and supports failure analysis. The SUSS PM5 allows the use of up to 12 SUSS probe heads at one time.[1][2]
What it is
The SUSS MicroTec PM5 is an analytical probe system for electrical testing of devices on wafers and substrates up to one hundred fifty millimetres in diameter.[1][2][4][3]
The PM5 is used as a probe station for direct contact measurements on wafers, chips, and substrates, and it supports electrical measurement work in characterization and failure analysis.[3][1][2]
How it works
Where it fits in the process flow
Applications
The PM5 is used for electrical characterization of fabricated devices on wafers and substrates.[1][2][3]
The PM5 is used for DC measurements, high-frequency measurements, and failure analysis, and it can also support manipulator-based placement of nanowires onto a device or substrate.[1][2][3]
- precise analysis of devices fabricated on wafers and substrates
- DC measurements
- HF measurements
- failure analysis
- nanowire pick-and-place onto a device or substrate
What do the numbers mean?
Wafer handling3
Configuration & options10
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of measurements are performed on this class of machine?General reference — not yet source-verified
Such systems support electrical characterization, continuity checks, parametric testing, and other wafer-level measurements performed through temporary probe contact.
Why is optical viewing used on probe stations?General reference — not yet source-verified
Optical viewing helps the operator or control system locate alignment marks and target pads so the probe tips can be positioned accurately.
Not publicly documented
The following facts about the PM5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PM5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PM5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PM5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PM5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]uwaterloo.ca — uwaterloo.cauwaterloo.ca
- [2]PM5 — SUSS MicroTec | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]polifab.polimi.it — polifab.polimi.itpolifab.polimi.it
- [4]SUSS MicroTec PM5 family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
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