SUSS MicroTec
PA 300
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The PA 300 ProbeShield Probing Station is configured with a 12-inch nickel plated aluminum chuck, an ATT M300 control unit, a Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.[3]
Where it fits in the process flow
Applications
General reference — not yet source-verifiedProbe stations are used for device probing, wafer-level electrical test, and parametric measurement.
What do the numbers mean?
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| PA 300 Control | — | — | CMP tool with a 500 VA, 115V, 60Hz power spec and a 12-inch nickel plated aluminum chuck. | waferpedia.com[3] |
| PA 300 ProbeShield Probing | — | — | Probingsstation configured with a 12-inch nickel plated aluminum chuck, ATT M300 control unit, Cascade CMPS-888 microscope, and SUSS PH150 micropositioners. | waferpedia.com[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the PA 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the PA 300 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PA 300 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the PA 300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PA 300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PA 300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]PA 300 — SUSS MicroTec | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 4, 2026.
