SPTS
MVD300
The SPTS MVD300 is a molecular vapor deposition (MVD) system for high-volume manufacturing of MEMS and other devices. The MVD300 supports batch processing of 200mm and 300mm wafers with up to four precursors and integrated plasma treatment. The MVD300 is also available as the MVD300E with an EFEM.[1]
Wafer size
200mm
Gas delivery
Up to 4 precursors[1]
What it is
The SPTS MVD300 is a molecular vapor deposition (MVD) system designed for high-volume manufacturing of semiconductor and microelectromechanical systems (MEMS) devices. The system is also capable of atomic layer deposition (ALD) processes. A variant, the MVD300E, includes an equipment front end module (EFEM) for automated wafer handling.[1][2]
Applications
Additional production applications include moisture barriers, anti-corrosion coatings, and release layers for imprinting. The tool’s ALD capability extends its use to other thin film deposition needs requiring atomic-level thickness control.[1][2]
- MEMS hydrophobic antistiction films
- Sensors
- Actuators
- Displays
- RF switches
- Inkjets
- Data storage devices
- Wettting control in micro-fluidics
- Lab-on-a-chip
- Microplates
- Passivation on implantable devices
- Functionalized surface coatings
- Genome sequencing diagnostics
- Moisture barriers
- Anti-corrosion coatings
- Release layers for imprinting
What do the numbers mean?
Wafer handling4
Gas & chemistry2
Configuration & options12
- Automation
- Automated process sequence routines, self-diagnostic and data logging capability[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MVD300E | — | — | Described as the MVD300E with an EFEM. | web.archive.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What types of MEMS devices benefit from MVD anti-stiction films?
Typical MEMS devices include sensors, actuators, displays, RF switches, inkjets, and data storage devices.[1]
Not publicly documented
The following facts about the MVD300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MVD300 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MVD300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MVD300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MVD300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MVD300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]SPTS Technologies Ltd. MVD300 / MVD300E Deposition Tool — atomiclayerdeposition.comatomiclayerdeposition.com
Last updated Sep 24, 2026.
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