SCREEN
RF 300 A Photo Track
The SCREEN / DNS RF 300 A Photo Track is a photo track. The RF 300 A Photo Track is manufactured by SCREEN / DNS. The RF 300 A Photo Track includes modifications such as robot changes, bake modules, loadports, and a cleanbooth.[1][2]
What it is
How it works
What do the numbers mean?
Power & electrical1
Wafer handling2
- Modifications
- Robot Change: IHU, MHU (2), BHU; Bake: CP (6), FRHP (7); Loadport (10); Cleanbooth; SC Cup Parts (2) (change and retrofit); SD Cup Parts, Nozzle (2) (change and retrofit); 10 L Nowpack Cabinet; ETU-Cab; Resist 8 High Viscosity (140 cp); Low Height Mod (Top Module Separation); BARC/Resist Separation Drain; Facility Connection Parts (change and retrofit); Power BOX Mod Parts (change and retrofit); Fire Suppression[1]
Gas & chemistry3
Dimensions & facilities1
- Low Height Mod (Top Module Separation)[1]
Configuration & options13
- Modifications:[1]
- Loadport (10)[1]
- Cleanbooth[1]
- SC Cup Parts (2)[1]
- (change and retrofit)[1]
- SD Cup Parts, Nozzle (2)[1]
- 10 L Nowpack Cabinet[1]
- ETU-Cab[1]
- Facility Connection Parts (change and retrofit)[1]
- Power BOX Mod Parts (change and retrofit)[1]
- Fire Suppression[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What modifications are available for the RF 300 A?
The RF 300 A includes modifications for robot change (IHU, 2× MHU, BHU), bake modules (6 CP, 7 FRHP), 10 loadports, cleanbooth, two SC cup parts and two SD cup parts (with change and retrofit), a 10 L Nowpack cabinet, an ETU-cab, resist high viscosity (140 cP) capability, low height mod, BARC/resist separation drain, facility connection parts, power BOX mod parts, and fire suppression.[1][2]
Not publicly documented
The following facts about the RF 300 A Photo Track are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RF 300 A Photo Track are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RF 300 A Photo Track are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RF 300 A Photo Track are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RF 300 A Photo Track are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RF 300 A Photo Track is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 3, 2026.
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