Waferpedia

Rorze

RR 713 L 1521 3 A 3 E 13 1 Atmospheric Wafer Handling Robot

Rorze RR 713 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Rorze RR 713 L 1521 3 A 3 E 13 1 is an atmospheric wafer handling robot designed for 6-inch wafers. The robot has a dual-arm configuration.[1][2]

RorzeRR 713 L 1521 3 A 3 E 13 1 Atmospheric Wafer Handling Robot
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What it is

The RR 713 L 1521 3 A 3 E 13 1 is a specific configuration of the series designed for 6-inch wafers and equipped with a dual-arm mechanism for wafer handling.[1][2]

What do the numbers mean?

Wafer handling1

Wafer size
6 inch[1]
Accurate?

Configuration & options2

Dual Arm[1]
Accurate?
Arm type
Dual Arm[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Does the robot have a single arm or dual arm?

The robot has a dual-arm configuration.[2]

What wafer size does the RR 713 L 1521 3 A 3 E 13 1 handle?

The robot is designed for 6-inch wafers.[1][2]

Not publicly documented

The following facts about the RR 713 L 1521 3 A 3 E 13 1 Atmospheric Wafer Handling Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RR 713 L 1521 3 A 3 E 13 1 Atmospheric Wafer Handling Robot are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the RR 713 L 1521 3 A 3 E 13 1 Atmospheric Wafer Handling Robot are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the RR 713 L 1521 3 A 3 E 13 1 Atmospheric Wafer Handling Robot are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the RR 713 L 1521 3 A 3 E 13 1 Atmospheric Wafer Handling Robot are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the RR 713 L 1521 3 A 3 E 13 1 Atmospheric Wafer Handling Robot is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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