Pfeiffer
TMH 071 P Vacuum
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Pfeiffer TMH 071 P Vacuum is a vacuum pump. The Pfeiffer TMH 071 P Vacuum has a supply of 60 l/s. The Pfeiffer TMH 071 P Vacuum has a mass of 2.8 kg.[1][2]
What it is
How it works
The TMH 071 P uses a permanent magnetic bearing on the high-vacuum side and an oil-lubricated ceramic bearing on the backing side.[5]
Where it fits in the process flow
Applications
What do the numbers mean?
Vacuum & pumping5
Control & software1
Dimensions & facilities1
Configuration & options10
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the pumping speed of the TMH 071 P?
The TMH 071 P has a pumping speed of 60 l/s for nitrogen.[3][2]
What is the ultimate pressure of the TMH 071 P?
The TMH 071 P has an ultimate pressure of less than 7 × 10⁻⁸ Torr.[2][4]
What type of bearings does the TMH 071 P use?
The TMH 071 P uses a permanent magnetic bearing on the high-vacuum side and an oil-lubricated ceramic bearing on the backing side.[2]
What inlet flange does the TMH 071 P have?
The TMH 071 P has an inlet flange of DN 63 ISO-K.[2]
Not publicly documented
The following facts about the TMH 071 P Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TMH 071 P Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TMH 071 P Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TMH 071 P Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TMH 071 P Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TMH 071 P Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]ajvs.com — ajvs.comajvs.com
- [4]provac.com — provac.comprovac.com
- [5]ajvs.com — ajvs.comajvs.com
- [6]Pfeiffer TMH 071p Turbo Pump Pmp02800g | Rebuilt | Provac Sales — provac.comprovac.com
Last updated Oct 11, 2026.