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OTFC 1550 Optical

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

OTFC 1550 Optical — Inventory photo
Fig. 01OTFC 1550 OpticalInventory photo[1]

Power

17 cm RF ion source[3]

Vacuum

SUS304, φ1550mm×1800mm (H)[3]

Optics

Precision Optics[2]

What it is

The OTFC 1550 is an optical thin film coater model from Optorun. The vacuum chamber is constructed from SUS304 stainless steel with a diameter of 1550 millimeters and a height of 1800 millimeters. The substrate dome has a diameter of 1400 millimeters. The substrate dome rotation speed is variable from 10 rpm to 30 rpm. The system achieves an ultimate pressure of 7.0 × 10⁻⁵ Pa or lower. Pump-down time from atmosphere to 1.3 × 10⁻³ Pa is 15 minutes. The substrate heater can reach a maximum temperature of 350 °C. The machine’s approximate external dimensions are 5500 millimeters width, 7200 millimeters depth, and 3700 millimeters height. The approximate gross weight is 10000 kilograms. Power requirement is three-phase, 200 volts, 50/60 Hz, 120 kVA. Cooling water flow rate is 180 liters per minute or greater. Compressed air pressure requirement is 0.5 MPa or greater.[3]

How it works

General reference — not yet source-verified

Optical thin film coaters operate under high vacuum by evaporating or sputtering coating materials onto a substrate. A typical system uses electron beam evaporation sources to vaporize materials, while an ion source bombards the growing film to improve density and adhesion in a process known as ion-assisted deposition. An optical thickness monitor continuously measures the reflectance or transmittance of the film to control layer thickness precisely.

Where it fits in the process flow

General reference — not yet source-verified

Optical thin film coaters are used in the fabrication of precision optics, typically after the lenses, mirrors, or other optical elements have been ground, polished, and cleaned. The coating process adds thin-film layers that modify the optical properties of the surface. Coated optics then proceed to assembly or further inspection steps.

Applications

The OTFC 1550 is suitable for producing anti-reflection coatings and optical filters including edge filters and band pass filters. The system can deposit over 100 layers, enabling complex multilayer designs.[3]

What do the numbers mean?

Power & electrical2

Ion source
17 cm RF ion source[3]
Accurate?
Power requirements
3-phase, 200V, 50/60Hz, 120kVA approx.[3]
Accurate?

Vacuum & pumping4

Vacuum chamber size
SUS304, φ1550mm×1800mm (H)[3]
Accurate?
Ultimate pressure
7.0×10^-5 Pa or lower[3]
Accurate?
Pump down rate
15 minutes (Atm. to 1.3×10^-3 Pa)[3]
Accurate?
Compressed air pressure
0.5MPa or greater[3]
Accurate?

Wafer handling3

Substrate dome size
φ1400mm[3]
Accurate?
Substrate dome rotation speed
10 rpm to 30 rpm (Variable)[3]
Accurate?
Substrate heater
350℃ (max.)[3]
Accurate?

Optics & imaging5

Category
Precision Optics[2]
Accurate?
Description
optical coater / optical thin film coater[1]
Accurate?
Application
producing AR coatings and optical filters such as edge filters and band pass filters[3]
Accurate?
Optical film thickness control system
HOM2-R-VIS350A High-precision Optical Monitor[3]
Accurate?
Optical monitor wavelength range
350nm to 1100nm[3]
Accurate?

Dimensions & facilities2

Cooling water flow rate
180ℓ/min or greater[3]
Accurate?
Gross weight
10000kg approx.[3]
Accurate?

Configuration & options6

Model
OTFC 1550[1]
Accurate?
Make
Optorun[1]
Accurate?
Vintage
2011[1]
Accurate?
Series
OTFC series[3]
Accurate?
Crystal film thickness monitor
XTC/3 plus 6-point rotary sensor[3]
Accurate?
Evaporation source
EB source: 2 units[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
OTFC-1550CBI/DBI——Vacuum chamber SUS304, φ1550mm×1800mm (H); substrate dome size φ1400mm; rotation speed 10 rpm to 30 rpm; HOM2-R-VIS350A optical monitor; XTC/3 plus 6-point rotary sensor; 2 EB sources; 17 cm RF ion source; roughing pump, 2 diffusion pumps plus Polycold or 2 cryo pumps plus cryo trap.allwin21.com[3]
OTFC-900CBI/DBI——Vacuum chamber SUS304, φ900mm×1300mm (H); substrate dome size φ790mm; rotation speed 10 rpm to 30 rpm; HOM2-R-VIS350A optical monitor; XTC/3 plus 6-point rotary sensor; 2 EB sources; 10 cm RF ion source; mechanical pump plus 1 diffusion pump plus Polycold or 1 cryo pump.optorun.sh.cn[4]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Vacuum chamber sizeSUS304, φ1550mm×1800mm (H)[3]
  • Ion source17 cm RF ion source[3]
  • Ultimate pressure7.0×10^-5 Pa or lower[3]
  • Pump down rate15 minutes (Atm. to 1.3×10^-3 Pa)[3]
  • Power requirements3-phase, 200V, 50/60Hz, 120kVA approx.[3]
  • Compressed air pressure0.5MPa or greater[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the vacuum chamber diameter of the OTFC 1550?

The vacuum chamber has a diameter of 1550 millimeters and a height of 1800 millimeters.[3]

What is the ultimate pressure of the OTFC 1550?

The ultimate pressure is 7.0 × 10⁻⁵ Pa or lower.[3]

How long does it take to pump down the OTFC 1550 from atmosphere to 1.3 × 10⁻³ Pa?

The pump-down time is 15 minutes.[3]

What type of ion source is used in the OTFC 1550?

The system uses a 17 cm RF ion source.[3]

Not publicly documented

The following facts about the OTFC 1550 Optical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OTFC 1550 Optical are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the OTFC 1550 Optical are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the OTFC 1550 Optical are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the OTFC 1550 Optical is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the OTFC 1550 Optical are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.comwaferpedia.com
  3. [3]allwin21.com — allwin21.comallwin21.com
  4. [4]optorun.sh.cn — optorun.sh.cnoptorun.sh.cn
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Last updated Oct 1, 2026.

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