Optorun
OTFC 1300 Optical
Power
Jeol JST 10 F EB Source Power Supply[1]
Vacuum
Brooks Cryogenic Cryochiller unit[2]
Optics
Optical Coater[1]
What it is
The Optorun OTFC 1300 is an optical thin-film coater used for depositing dielectric layers onto optical substrates.[1][2][3]
The machine is part of the OTFC series, which is designed for producing anti-reflection coatings and optical filters.[3]
The OTFC 1300 uses an ion-assisted deposition process to achieve precise and uniform thin-film layers.[3]
How it works
The system uses two electron-beam evaporation sources and a multi-point crucible hearth or annular hearth to deposit coatings.[3]
A 60-point high-precision optical monitor, the HOM2-R-VIS350A, measures film thickness across a wavelength range of 350 nm to 1100 nm, supporting both reflection and transmission modes.[3]
A crystal film thickness monitor (XTC/3) with a 6-point rotary sensor provides complementary thickness control.[3]
Substrates are mounted on a center-driven or planetary dome, with a diameter of 1130 mm and rotation speed variable from 10 rpm to 50 rpm.[3]
Where it fits in the process flow
Pumping is achieved by two diffusion pumps with a Polycold chiller, or by two cryo-pumps with a cryo trap, allowing the chamber to reach an ultimate pressure of 7.0×10-5 Pa or lower.[3]
Applications
The coater can deposit over 100 layers of dielectric materials, enabling complex multilayer coatings for precision optics.[3]
What do the numbers mean?
Power & electrical4
- Jeol JST 10 F EB Source Power Supply[1]
Vacuum & pumping6
- Brooks Cryogenic Cryochiller unit[2]
Wafer handling3
Optics & imaging4
Control & software1
Dimensions & facilities3
Configuration & options13
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationJeol JST 10 F EB Source Power Supply[1]
- ConfigurationBrooks Cryogenic Cryochiller unit[2]
- Vacuum chamberSUS304, φ1300mm×1610mm (H)[3]
- Ion source17 cm RF ion source[3]
- Vacuum systemRoughing Pump, 2 Diffusion Pumps + Polycold or 2 Cryo Pumps + Cryo Trap[3]
- Ultimate pressure7.0×10^-5 Pa or lower[3]
- Pump down rate15 minutes (Atm. to 1.3×10^-3 Pa)[3]
- Power requirements3-phase, 200V, 50/60Hz, 100kVA approx.[3]
- Compressed air pressure0.5MPa or higher[3]
- Included componentJeol JST 10 F EB Source Power Supply[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the OTFC 1300 Optical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OTFC 1300 Optical are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the OTFC 1300 Optical are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the OTFC 1300 Optical are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the OTFC 1300 Optical is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the OTFC 1300 Optical are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]allwin21.com — allwin21.comallwin21.com
- [4]dynamicmos.com — dynamicmos.comdynamicmos.com
Last updated Sep 1, 2026.
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