Ontrak
DSS 200 Synergy Brush
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Ontrak DSS 200 Synergy Brush is a wet processing / clean tool. The Ontrak DSS 200 Synergy Brush is a post-CMP wafer cleaner. The Ontrak DSS 200 Synergy Brush is configured for 100-200mm substrate processing.[1][2]
What it is
How it works
Where it fits in the process flow
The DSS-200 cleaner is used for post-CMP clean, pre-bond clean, pre-photo clean, advanced packaging applications, post-metal deposition, post-ILD deposition, post-scribe, and substrate manufacturing.[2]
The DSS-200 cleaner supports substrate configurations from 100 mm to 200 mm and can accommodate smaller wafers with custom-designed carriers.[2]
Applications
What do the numbers mean?
Wafer handling2
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What substrate sizes does the DSS 200 Synergy Brush support?
The DSS 200 Synergy Brush is configured for 100 to 200 mm substrate processing and can accommodate smaller wafers with custom-designed carriers.[1][2]
What cleaning methods does the DSS 200 Synergy Brush use?
The DSS-200 cleaner uses brush-scrub cleaning and spin plus heat-lamp drying.[2]
What process chemistries does the DSS 200 Synergy Brush support?
The DSS-200 cleaner supports NH4OH, dHF, SC-1, SC-2, backside chemical, metal CMP cleans, and STI CMP cleans.[2]
Not publicly documented
The following facts about the DSS 200 Synergy Brush are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DSS 200 Synergy Brush are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DSS 200 Synergy Brush are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DSS 200 Synergy Brush are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DSS 200 Synergy Brush are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DSS 200 Synergy Brush is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]entrepix.com — entrepix.comentrepix.com
- [3]Inventory photo
Last updated Oct 7, 2026.
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