Onto Innovation

Sonus 7800

Research Quality: 50% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Rudolph Sonus 7800 is an acoustic metrology and defect detection system. The Sonus 7800 is configured for 300 mm (12-inch) wafers. The Sonus 7800 uses SONUS Technology, which is non-contact and non-destructive.^[1]^[2]

Sonus 7800 — Inventory photo — Fig. 01Sonus 7800Inventory photo^[2]

What it is

The Onto Innovation (formerly Rudolph) Sonus 7800 is an acoustic metrology and defect detection system for semiconductor wafers.^[1]

How it works

The Sonus 7800 employs non-contact, non-destructive acoustic metrology using SONUS technology.^[1]

The system measures thick films and film stacks and detects defects such as voids in through silicon vias (TSVs).^[1]

Where it fits in the process flow

The system is applied in advanced packaging processes, particularly for metrology of copper pillar bumps and inspection of TSVs.^[1]

Applications

The Sonus 7800 is used for measuring thick films and film stacks in copper pillar bumps and for detecting voids in through silicon vias (TSVs).^[1]

Copper pillar bumps are a critical component of advanced packaging, and TSVs provide signal routing in three-dimensional integrated circuits (3DICs).^[1]

What do the numbers mean?

Wafer handling2

Wafer size: 12 inch^[2]
Wafer size (version): 300 MM^[1]

Configuration & options3

System type: Acoustic Metrology and Defect Detection System^[1]
Measurement technology: SONUS Technology^[1]
Measurement approach: Non-contact and non-destructive^[1]

Interested in this tool?

Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Not publicly documented

The following facts about the Sonus 7800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Sonus 7800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Sonus 7800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Sonus 7800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Sonus 7800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Sonus 7800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report