Onto Innovation
NSX 320 + SWS + WHS Macro Defect
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Onto Innovation NSX 320 + SWS + WHS Macro Defect is a macro defect inspection system for semiconductor manufacturing.[1]
How it works
General reference — not yet source-verifiedA macro defect inspection system examines patterned surfaces for visible anomalies, foreign material, and other large-scale defects before further processing or release.
Such systems typically use optical imaging, automated stage motion, and software-based review to locate and classify defects on wafers or related process substrates.
Where it fits in the process flow
General reference — not yet source-verifiedMacro defect inspection sits in the metrology and inspection flow of semiconductor manufacturing.
The equipment is used to screen material before downstream process steps and to verify surface quality after process steps that can introduce contamination, pattern damage, or other visible defects.
Applications
General reference — not yet source-verifiedMacro defect inspection is used for semiconductor wafers and other patterned substrates that require optical review for surface defects.
The class is used in fabrication flows that need noncontact inspection of gross defects, particles, scratches, and other visible irregularities.
What do the numbers mean?
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is it?
The equipment is a macro defect inspection system.[1]
Not publicly documented
The following facts about the NSX 320 + SWS + WHS Macro Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 320 + SWS + WHS Macro Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSX 320 + SWS + WHS Macro Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSX 320 + SWS + WHS Macro Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSX 320 + SWS + WHS Macro Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSX 320 + SWS + WHS Macro Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Oct 6, 2026.
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