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Olympus

MX 61 L F 300 MM

Metrology & InspectionOlympus MX 61 family
Research Quality: 40% complete

The Olympus MX 61 L F 300 MM is an inspection microscope. The Olympus MX 61 L F 300 MM is configured for brightfield and darkfield inspection. The Olympus MX 61 L F 300 MM includes RS 232 C interface for PC data export.[1][2]

Olympus logo
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What it is

The Olympus MX 61 L F 300 MM is an inspection microscope in the metrology and inspection category. The Olympus MX 61 L F 300 MM is configured for brightfield and darkfield inspection.[1][2]

How it works

The Olympus MX 61 L F 300 MM uses a trinocular observation tube and interchangeable eyepieces for visual viewing. The Olympus MX 61 L F 300 MM includes a camera output path through an optional digital CCD camera with PC and software.[1][2]

The Olympus MX 61 L F 300 MM uses brightfield and darkfield illumination to reveal different surface features. The Olympus MX 61 L F 300 MM includes front mounted light-intensity controls, a cube slider for brightfield, darkfield, and optional DIC selection, and a DIC Nomarski slider.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

An inspection microscope is typically used after a process step when a surface must be checked before release, rework, or further analysis. A tool of this class sits downstream of fabrication or sample preparation and upstream of disposition, documentation, or further metrology.

Applications

The Olympus MX 61 L F 300 MM is suited to brightfield inspection, darkfield inspection, and optional DIC observation. The Olympus MX 61 L F 300 MM includes objective choices of 5X, 10X, 20X, 50X, and 100X, and it includes 10x eyepieces.[1][2]

The Olympus MX 61 L F 300 MM includes a 14x12 stage, a motorized nosepiece rotation, an RS 232 C interface for PC data export, and camera options for digital image capture. The Olympus MX 61 L F 300 MM also includes analyzer, polarizer, and filter accessories for optical contrast control.[1][2]

What do the numbers mean?

Optics & imaging10

Super widefield SWH 10 x-H/ 26.5 eyepieces, Full Set Olympus Objective 5X,10X,20X,50X & 100X[1]
Accurate?
Lumenera Infinity 2-3C, 3.3 megapixel Digital CCD Camera with PC and software[1]
Accurate?
Olympus U-LH100-3 12V100W Illuminator[1]
Accurate?
Schott YAHATA Megalight 100 Illuminator with Olympus LG-SF tube[1]
Accurate?
Lumenera Infinity 1 Digital CCD Camera with PC and software[1]
Accurate?
Objectives
Olympus objective 5X, 10X, 20X, 50X and 100X[1]
Accurate?
Illuminator
Olympus U-LH100-3 12V100W illuminator[1]
Accurate?
Additional illuminator
Schott YAHATA Megalight 100 illuminator with Olympus LG-SF tube[1]
Accurate?
Camera option
Lumenera Infinity 2-3C, 3.3 megapixel digital CCD camera with PC and software[1]
Accurate?
Camera
Lumenera Infinity 1 digital CCD camera with PC and software[1]
Accurate?

Control & software3

RS 232 C interface for PC data export[1]
Accurate?
Light control
Front mounted controls for light intensity[1]
Accurate?
Interface
RS 232 C interface for PC data export[1]
Accurate?

Configuration & options22

14x12 stage[1]
Accurate?
Flat panel[1]
Accurate?
Titling Trinocular Observation Tube[1]
Accurate?
Clutch Driven Manual XY Stage with coaxial controls (Olympus MX-SIC 1412 RS)[1]
Accurate?
Configured for brightfield and darkfield inspection, front mounted controls for light intensity, 3 position cube slider for BF/DF/optional DIC[1]
Accurate?
Olympus U-DICR DIC Nomarski Slider[1]
Accurate?
Motorized nosepiece rotation[1]
Accurate?
Olympus Microscope U-AN360-3 Rotating Analyzer[1]
Accurate?
Olympus U-25ND25 BX2 Neutral Density Filter in Slider 25% , Olympus U-25LBD Daylight Blue Filter Slider & Olympus U-PO3 Polarizer Slider[1]
Accurate?
Full tested and refurbished by Olympus authorized technician[1]
Accurate?
Type
Inspection microscope[1]
Accurate?
Inspection modes
Brightfield and darkfield inspection[1]
Accurate?
Stage
14x12 stage[1]
Accurate?
Observation tube
Titling trinocular observation tube[1]
Accurate?
XY stage
Clutch driven manual XY stage with coaxial controls (Olympus MX-SIC 1412 RS)[1]
Accurate?
Cube slider
3 position cube slider for BF/DF/optional DIC[1]
Accurate?
DIC slider
Olympus U-DICR DIC Nomarski slider[1]
Accurate?
Eyepieces
Super widefield SWH 10 x-H/ 26.5 eyepieces[1]
Accurate?
Nosepiece
Motorized nosepiece rotation[1]
Accurate?
Analyzer
Olympus U-AN360-3 rotating analyzer[1]
Accurate?
Filters
Olympus U-25ND25 BX2 neutral density filter in slider 25%, Olympus U-25LBD daylight blue filter slider, and Olympus U-PO3 polarizer slider[1]
Accurate?
Refurbishment
Full tested and refurbished by Olympus authorized technician[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What inspection modes does the Olympus MX 61 L F 300 MM support?

The Olympus MX 61 L F 300 MM is configured for brightfield and darkfield inspection. The Olympus MX 61 L F 300 MM also includes an optional DIC path through a cube slider and a DIC Nomarski slider.[1][2]

How is the specimen stage arranged on the Olympus MX 61 L F 300 MM?

The Olympus MX 61 L F 300 MM includes a 14x12 stage and a clutch-driven manual XY stage with coaxial controls. The Olympus MX 61 L F 300 MM also includes motorized nosepiece rotation.[1][2]

Does the Olympus MX 61 L F 300 MM support computer data export?

The Olympus MX 61 L F 300 MM includes an RS 232 C interface for PC data export.[1][2]

Not publicly documented

The following facts about the MX 61 L F 300 MM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MX 61 L F 300 MM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MX 61 L F 300 MM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MX 61 L F 300 MM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MX 61 L F 300 MM are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MX 61 L F 300 MM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]MX 61 L F 300 MM — Olympus | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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