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Olympus

MX 61

Metrology & InspectionOlympus MX 61 family
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MX 61 — Inventory photo
Fig. 01MX 61Inventory photo[1]

What it is

The Olympus MX 61 is a high-power microscope used in the semiconductor industry for metrology and inspection tasks.[1][4][5]

How it works

The MX 61 is an optical microscope that uses a series of objective lenses and an illumination system to produce magnified images of a sample. The microscope provides high image resolution and clarity through observation methods such as brightfield and darkfield.[3]

Applications

General reference — not yet source-verified

Additional applications include the examination of photomasks, microelectromechanical systems (MEMS) devices, and other precision components where high-resolution optical imaging is needed.

What do the numbers mean?

Power & electrical2

50/60 Hz[1]
Accurate?
Power
50/60 Hz[1]
Accurate?

Optics & imaging1

Objectives
5 X, 20 X, 50 X, 100 X and 150 X on motorized turret[3]
Accurate?

Control & software1

Digital imaging
Steam Motion software for calibrated measurements[3]
Accurate?

Configuration & options10

High Power[1]
Accurate?
1.9/0.9 A[1]
Accurate?
OEM
Olympus[1]
Accurate?
Model
MX 61[1]
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Equipment type
Microscope[1]
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Description
High power[1]
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Current
1.9/0.9 A[1]
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Vendor model
MX61A[3]
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Purpose
Semiconductor microscope for sample inspection and documentation[3]
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Stage focus
Motorized stage focus[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
MX61A——Model designation listed for Microscope #1.uwaterloo.ca[3]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]
  • Power50/60 Hz[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the purpose of the Olympus MX 61?

The MX 61 is a high-power microscope used for semiconductor sample inspection and documentation.[3]

What observation methods does the MX 61 support?

The microscope supports observation methods such as brightfield and darkfield.[3]

What objectives are available for the MX 61 family?

The MX 61 variant MX61A is equipped with 5X, 20X, 50X, 100X, and 150X objectives on a motorized turret.[3]

Does the MX 61 have motorized stage control?

The MX61A variant features a motorized stage focus.[3]

Not publicly documented

The following facts about the MX 61 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MX 61 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the MX 61 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MX 61 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MX 61 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the MX 61 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]uwaterloo.ca — uwaterloo.cauwaterloo.ca
  4. [4]Olympus MX 61 family | Waferpedia — waferpedia.comwaferpedia.com
  5. [5]MX 61 — Olympus | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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