Waferpedia

Olympus

MX 50 Optical

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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Olympus MX 50 is an optical microscope for semiconductor analysis. The MX 50 supports wafer sizes up to 150 mm (6 inch) through interchangeable chucks and stages. The MX 50 can be equipped with motorized stage, focus, and autofocus options.[1]

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What is it?

The Olympus MX 50 is an optical microscope designed for semiconductor analysis.

What do the numbers mean?

Wafer handling1

Maximum wafer diameter
6 inch (150 mm)[1]
Accurate?

Configuration & options4

Stage travel
154x154 mm[1]
Accurate?
Motorized focus
Available (PS3H122R + H807 or H122KBIX)[1]
Accurate?
Autofocus
Available (PF850 standalone hardware autofocus)[1]
Accurate?
Microscope type
Upright[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Olympus MX 50 designed for?

The MX 50 is a microscope designed for semiconductor analysis.[1]

What wafer sizes can the MX 50 handle?

The MX 50 can accommodate wafers up to 150 mm (6 inches) in diameter using optional wafer chucks, including the HWC15S for 4 and 6 inch wafers and the HWC15V rotating vacuum chuck for 150 mm wafers.[1]

Not publicly documented

The following facts about the MX 50 Optical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MX 50 Optical are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MX 50 Optical are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MX 50 Optical are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MX 50 Optical are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MX 50 Optical is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]prior.com — prior.comprior.com
  2. [2]Equipment inventory listing
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Last updated Sep 27, 2026.

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