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Nikon

Optiphot 200

Metrology & InspectionNikon Optiphot family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Optiphot 200 — Inventory photo
Fig. 01Optiphot 200Inventory photo[1]

What it is

The Nikon Optiphot 200 is a microscope designed for inspection tasks.[4][1][5]

How it works

General reference — not yet source-verified

Optical inspection microscopes operate by focusing visible light onto the sample surface and collecting the reflected or transmitted light through a series of objective lenses to create a magnified image for the operator.

Common illumination techniques available on such microscopes include brightfield, darkfield, and differential interference contrast, which enhance the visibility of different types of surface features.

Where it fits in the process flow

General reference — not yet source-verified

Inspection microscopes are used throughout the semiconductor fabrication process for in-line quality control and off-line failure analysis.

Typical steps where an inspection microscope is applied include after photolithography to check pattern fidelity, after etching to examine sidewall profiles, and after deposition to detect particles or pinholes.

Applications

General reference — not yet source-verified

The Nikon Optiphot 200 is applied in wafer inspection for defect detection, critical dimension verification, and overlay alignment checks.

Additional applications include examining thin films, solder bumps, and micro-electromechanical system (MEMS) components where high-resolution optical inspection is required.

What do the numbers mean?

Power & electrical2

50/60 Hz[1]
Accurate?
100-120 V[1]
Accurate?

Configuration & options1

3A[1]
Accurate?
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What replaced it?

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]
  • Configuration100-120 V[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of microscope is the Nikon Optiphot 200?

The Nikon Optiphot 200 is an inspection microscope.[5]

Who manufactures the Nikon Optiphot 200?

The Nikon Optiphot 200 is manufactured by Nikon.[4][1][5]

What is the model designation of this microscope?

The model designation is Optiphot 200.[4][1][5]

Not publicly documented

The following facts about the Optiphot 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Optiphot 200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Optiphot 200 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Optiphot 200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Optiphot 200 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Optiphot 200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]epfl.chepfl.ch
  4. [4]Equipment inventory listing
  5. [5]Leica DM8000 ‒ Center of MicroNanoTechnology CMi ‐ EPFL — epfl.chepfl.ch
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Last updated Sep 30, 2026.

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