Nikon
NSR 2205 i 11 D i-Line
What it is
What do the numbers mean?
Wafer handling1
Optics & imaging4
Performance1
Control & software2
- With HDD & Software[1]
Configuration & options9
- Stepping 3 Sigma:[1]
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Canon FPA 2500 i 3 i-Line— Same function class: Lithography, nullCompare in depthsource[7]
- Canon FPA 3000 i 4 i-Line— Same function class: Lithography, nullCompare in depthsource[7]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the NSR 2205 i 11 D i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 11 D i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 11 D i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2205 i 11 D i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2205 i 11 D i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2205 i 11 D i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (8)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]Equipment inventory listing
- [8]Equipment inventory listing
Last updated Sep 29, 2026.
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The Canon FPA 2500 i 3 is an i-line stepper for 8-inch wafers with a 5-inch reticle.
Canon FPA 3000 i 4 i-Line Stepper is an 8-inch lithography stepper with i-line designation.