Logitech
CP3000
Plate 01Logitech CP3000 (CMP) Chemical Mechanical Polisher
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What it is
The Logitech CP3000 is a chemical polishing and chemical mechanical polishing system designed for precision processing of semiconductor and optical materials.[2][3]
The CP3000 is a gear-driven system for polishing and etching of advanced materials, supporting a range of semiconductor and optical crystals.[2][3]
How it works
The CP3000 uses a gear drive mechanism to rotate samples in planetary gears around a central drive for fine etching and polishing of thin and ultra-thin wafers.[2][3]
A joystick-controlled panel allows operation of the system, and components include a corrosion-resistant chemical feed unit, drain tank, and removable PVC drip tray.[2][3]
The system supports both aggressive polishing and less aggressive Chemlox polishing tasks.[2][3][4]
Where it fits in the process flow
Applications
The CP3000 is used for fine etching of semiconductor wafers made from Gallium Arsenide, Indium Phosphide, and other II-VI and III-V compounds, as well as for polishing delicate electro-optic crystals.[2][3][4]
CMP applications include tribology science and research, such as coefficient of friction (CoF) monitoring, and adaptation for Microelectromechanical Systems (MEMS) fabrication, including polysilicon surface micromachining and Opto-MEMS and Bio-MEMS packaging.[2][4]
- Handling and filtration of toxic gases, vapours, particles and odours
- Fine prime face polishing of semiconductor wafers
- Processing of other electronic and opto-electronic crystals
- Use with bromine methanol and alkaline or acid etches
- Semiconductor materials
- Optical polishing and processing of optical components
What do the numbers mean?
Power & electrical4
Gas & chemistry1
Dimensions & facilities1
Configuration & options12
- Filter type
- OS 4 Pre-Filter 1; Organic Vapours Secondary acids Enviro Carbon Filter (OS); Acid Vapours Secondary Organic acids Enviro Carbon Filter (H+)[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the wafer capacity of the CP3000?
The CP3000 can process up to three 75 mm (3-inch) wafers or three 100 mm (4-inch) wafers.[2][3]
What power supply options are available?
The CP3000 is available with a 220-240V, 50Hz or a 110V, 50/60Hz power supply.[2][3]
Not publicly documented
The following facts about the CP3000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CP3000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CP3000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CP3000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CP3000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CP3000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]CP3000 Chemical Polishing System for Precision Wafer Processing — logitech.uk.comlogitech.uk.com
- [3]CP3000 Chemical & Chemical Mechanical Polishing | Logitech — logitech.uk.comlogitech.uk.com
- [4]CP3000 Chemical & Chemical Mechanical Polishing by Logitech Limited | Albus — diagon.aidiagon.ai
Last updated Sep 26, 2026.
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