Laurell
Lz-23 B
The Laurell Lz-23 B is a 650-series spin coater. The Laurell Lz-23 B accepts substrates up to 150mm (5×5 inches). The Laurell Lz-23 B spins up to 12000 RPM.[1]
What it is
The Laurell Lz-23 B is a spin coater for resist processing.[1]
How it works
General reference — not yet source-verifiedA spin coater holds a substrate on a rotating chuck and uses centrifugal force to spread a liquid film across the surface.
Spin coating is used to form uniform thin coatings from liquid materials by controlling rotation speed and coating time.
Where it fits in the process flow
General reference — not yet source-verifiedA spin coater sits in the resist coating stage of a lithography flow.
The Lz-23 B is used before exposure and pattern transfer steps that follow resist application.
Applications
General reference — not yet source-verifiedThe Lz-23 B is used for coating photoresist and similar liquid films on substrates.
Spin coating equipment of this class is also used for other thin-film deposition tasks that require a controlled, uniform layer on a flat substrate.
What do the numbers mean?
Wafer handling1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the Lz-23 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Lz-23 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Lz-23 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Lz-23 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Lz-23 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Lz-23 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
Last updated Oct 7, 2026.
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