Lam Research
Rainbow 9400 Dry
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedA dry etcher removes material from a wafer by using a plasma-based gas environment rather than a liquid chemical bath.
A dry etch tool is used to transfer patterned openings into underlying films or layers with directional material removal.
Where it fits in the process flow
General reference — not yet source-verifiedA dry etcher sits in the pattern transfer portion of semiconductor fabrication.
A dry etch step usually follows pattern definition by lithography and mask alignment and precedes later cleaning, metrology, or downstream deposition steps.
Applications
General reference — not yet source-verifiedDry etch tools are used for semiconductor pattern transfer on wafer surfaces.
Dry etch tools are commonly used when controlled removal of thin films or semiconductor layers is needed.
What do the numbers mean?
Wafer handling1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Rainbow 9400 Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Rainbow 9400 Dry are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 9400 Dry are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 9400 Dry are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 9400 Dry are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 9400 Dry are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Rainbow 9400 Dry — Lam Research | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 4, 2026.
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