Lam Research
Rainbow 4506 I
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedEtch tools sit in pattern transfer after lithography has defined the areas to be opened on the wafer.
A plasma etcher is used after masking and before later wafer processing steps that follow material removal.
Applications
What do the numbers mean?
Power & electrical5
Vacuum & pumping1
Wafer handling5
Gas & chemistry8
Control & software2
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- RFPDW2200 400Kc generator (main chamber)[1]
- ConfigurationRFG1250 13.56MHz (ISO chamber)[1]
- ConfigurationRF Cart[1]
- Turbo pumpsNo[1]
- GAS 1Ar: 500 sccm[1]
- GAS 2CF4: 100 sccm[1]
- GAS 3CHF3: 50 sccm[1]
- GAS 4He: 1000 sccm[1]
- GAS 5O2: 20 sccm[1]
- GAS 6N2: 540 sccm[1]
- RFRFG1250 13.56MHz (ISO chamber)[1]
- RF cartPresent[1]
- GAS 7NF3: 1150 sccm[1]
- GAS 8He: 480 sccm[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Lam Rainbow 4506 I?
It is a plasma etcher.[1]
Not publicly documented
The following facts about the Rainbow 4506 I are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4506 I are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 4506 I are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 4506 I are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4506 I are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4506 I is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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