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Gasonics L 3500
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Gasonics L3500 is a plasma asher used for stripping photoresist. The Gasonics L3500 operates with O2 and N2 process gases. The Gasonics L3500 can be configured for wafer sizes from 4 to 12 inches.[1][2]
What it is
The Gasonics L3500 plasma system is designed for ashing and cleaning semiconductor wafers. The model L3500 is manufactured by Gasonics and is categorized as a plasma asher semiconductor process equipment. The system can be configured for wafer sizes including 12 inch, 8 inch, or 6 inch depending on the specific unit.[3][1][2]
What do the numbers mean?
Wafer handling4
Gas & chemistry1
Dimensions & facilities1
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Process gasesO2 and N2[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Gasonics L3500 support?
The L3500 can be configured for 12 inch, 8 inch, or 6 inch wafers depending on the system configuration.[3][1][2]
What process gases does the L3500 use?
The Gasonics L3500 uses oxygen (O2) and nitrogen (N2) as process gases.[1][2]
What is the primary function of the Gasonics L3500?
The L3500 is a plasma asher designed for ashing and cleaning semiconductor wafers by removing photoresist using monatomic oxygen generated from a microwave plasma.[1][2]
What robot upgrade is available for the L3500?
Some units of the L3500 include a HINE Hatm 5.0 atmospheric robot arm upgrade.[2]
Not publicly documented
The following facts about the Gasonics L 3500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics L 3500 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics L 3500 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics L 3500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics L 3500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics L 3500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [2]online-auctions.be — online-auctions.beonline-auctions.be
- [3]Equipment inventory listing
Last updated Sep 24, 2026.
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