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LAM RESEARCH

CORPORATION TCP 9600

LAM RESEARCH CORPORATION TCP 9600 family
Research Quality: 10% complete
LAM RESEARCHCORPORATION TCP 9600
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What is it?

What do the numbers mean?

Configuration & options4

Vintage
1996(inventory listing)
Accurate?
Vintage
1999(inventory listing)
Accurate?
Dry / Plasma Etch Vintage
1996(inventory listing)
Accurate?
Dry / Plasma Etch Vintage
1999(inventory listing)
Accurate?

Observed configurations

How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.

Unit as listed

  • Handles Silicon and Silicon on insulator wafers
  • 6"
  • Typical gases: CL2, BCl3, SF6, N2, O2, Ar, CF4, and DI water
  • Al etch module with DSQ and ideally an APM module
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the CORPORATION TCP 9600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the CORPORATION TCP 9600 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CORPORATION TCP 9600 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the CORPORATION TCP 9600 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the CORPORATION TCP 9600 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CORPORATION TCP 9600 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

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Last updated Sep 22, 2026.

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