Lam Research
Alliance 6 9400 DFM
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam Research Alliance 6 9400 DFM is an etch tool. The Alliance 6 9400 DFM accommodates 8-inch wafers.[1]
What it is
The Lam Research Alliance 6 9400 DFM is an etch tool for semiconductor manufacturing.[2]
How it works
General reference — not yet source-verifiedAn etch tool removes selected material from patterned wafers after lithography has defined the regions to be opened or shaped.
Etch systems use controlled process chemistry and plasma or related reactive environments to transfer patterns into films on the wafer surface.
Where it fits in the process flow
General reference — not yet source-verifiedThe Alliance 6 9400 DFM belongs in the pattern transfer stage of semiconductor fabrication.
The Alliance 6 9400 DFM operates after a masking or patterning step and before later cleaning, film deposition, or further fabrication steps that use the etched features.
Applications
General reference — not yet source-verifiedEtch tools are used to form features in semiconductor films and to define device structures on wafers.
Etch processing can be applied to conductive, dielectric, or other thin-film materials depending on the process chemistry and chamber configuration.
What do the numbers mean?
Wafer handling1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the equipment category of the Alliance 6 9400 DFM?
The Alliance 6 9400 DFM is an etch tool.[2]
Not publicly documented
The following facts about the Alliance 6 9400 DFM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Alliance 6 9400 DFM are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alliance 6 9400 DFM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alliance 6 9400 DFM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alliance 6 9400 DFM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alliance 6 9400 DFM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Alliance 6 9400 DFM — Lam Research | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 30, 2026.
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