KLA
Surfscan SP 1 Unpatterned Wafer Inspector
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA Surfscan SP 1 is an unpatterned wafer inspector for bare silicon and unpatterned surface inspection. The KLA Surfscan SP 1 uses an argon ion laser at 488 nm. The KLA Surfscan SP 1 supports wafer sizes from 150 mm to 300 mm.[1][2]
Power
240 VAC, Single Phase[2]
Vacuum
125 wph @0.08 µm HT; 40 wph @0.06 µm HS[2]
Optics
Argon Ion Laser (488 nm)[3]
What it is
Applications
What do the numbers mean?
Power & electrical2
Vacuum & pumping6
- Substrate Supported Sizes
- 300 mm, 200 mm, 150 mm (vacuum handling); 300 mm or 200 mm only for Edge Handling and BSIM configurations[2]
- Throughput (200 mm, Vacuum Handling)
- 125 wph (Frontside, @0.08 µm HT); 40 wph (Frontside, @0.06 µm HS)[2]
- Throughput (300 mm, Vacuum Handling)
- 90 wph (Frontside, @0.08 µm HT); 22 wph (Frontside, @0.06 µm HS)[2]
- Supported Substrate Sizes
- 150mm, 200mm, 300mm (vacuum handling); 300mm or 200mm only for Edge Handling and BSIM configurations[2]
Wafer handling1
- Dimensions (Standard Handler)
- Height: 183 cm (72"); Width: 117 cm (46"); Depth: 122 cm (48")[2]
Optics & imaging3
- Defect Sensitivity (frontside, polished bare Si, >95% capture rate)
- >0.083 µm diameter PSL sphere equivalent with normal illumination; >0.060 µm with oblique illumination[2]
Control & software2
Dimensions & facilities3
Configuration & options4
- Defect Sensitivity (SP1 DLS variant)
- 0.050 µm defect sensitivity on polished bare silicon[3]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SP1 TB1 | — | — | Bare wafer inspection variant; software version 3.5; 2X open cassette loading; 240 VAC single phase | rawbw.com[2] |
| SP1 DLS | — | — | Argon Ion Laser (488 nm); 0.050 µm defect sensitivity; includes Real Time Defect Classification and Map to Map capabilities | classoneequipment.com[3] |
| SP1 TBI | — | — | Referenced as a spare parts listing for SP1/SP1-TBI handler parts and lasers | metrologyequipmentservices.com[4] |
| SP1 XP | — | — | Listed as a variant in the same product family | metrologyequipmentservices.com[4] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Substrate Supported Sizes300 mm, 200 mm, 150 mm (vacuum handling); 300 mm or 200 mm only for Edge Handling and BSIM configurations[2]
- Throughput (200 mm, Vacuum Handling)125 wph (Frontside, @0.08 µm HT); 40 wph (Frontside, @0.06 µm HS)[2]
- Throughput (300 mm, Vacuum Handling)90 wph (Frontside, @0.08 µm HT); 22 wph (Frontside, @0.06 µm HS)[2]
- System Power Rating (SP1 TB1)240 VAC, Single Phase[2]
- Supported Substrate Sizes150mm, 200mm, 300mm (vacuum handling); 300mm or 200mm only for Edge Handling and BSIM configurations[2]
- System Power Rating240 VAC, Single Phase[2]
- Throughput (200mm, Vacuum Handling, Frontside)125 wph @0.08 µm HT; 40 wph @0.06 µm HS[2]
- Throughput (300mm, Vacuum Handling, Frontside)90 wph @0.08 µm HT; 22 wph @0.06 µm HS[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Surfscan SP 1 Unpatterned Wafer Inspector are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 Unpatterned Wafer Inspector are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Surfscan SP 1 Unpatterned Wafer Inspector are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan SP 1 Unpatterned Wafer Inspector are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan SP 1 Unpatterned Wafer Inspector is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Surfscan SP 1 Unpatterned Wafer Inspector are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]rawbw.com — rawbw.comrawbw.com
- [3]classoneequipment.com — classoneequipment.comclassoneequipment.com
- [4]metrologyequipmentservices.com — metrologyequipmentservices.commetrologyequipmentservices.com
- [5]Equipment inventory listing
- [6]http://www.rawbw.com/~gecko/Inventory/KLA-Tencor_Surfscan_SP1_TB1_Bare_Wafer_Inspection.pdf — rawbw.comrawbw.com
Last updated Sep 27, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
