KLA
MicroSense UMSC 200 BT Measurement
The KLA MicroSense UMSC 200 BT Measurement is a non-contact measurement system in the Metrology & Inspection category. The KLA MicroSense UMSC 200 BT performs flatness and thickness measurement. The KLA MicroSense UMSC 200 BT is configured for 10 A, 120 V, 50/60 Hz, with 50 PSI main air and 5 Psi stage air.[1][2][3][4]
How it works
The UMSC 200 BT employs non-contact sensor technology to measure the flatness and thickness of substrates without physical contact. The system uses a pneumatic control system with pressure monitoring gauges and safety interlocks. An emergency stop function and safety interlock systems are integrated into the control architecture. The measurement head and associated electronics are housed in a primary sensor housing with integrated controls.[1]
What do the numbers mean?
Power & electrical3
- 50/60 HZ[1]
Vacuum & pumping7
- Pressure monitoring gauges[1]
- Control features
- Pneumatic control system; emergency stop functionality; pressure monitoring gauges; user-friendly interface; safety interlocks[1]
- System components
- Main measurement unit with integrated controls; control panel with pneumatic controls, pressure gauges, and safety switches; dedicated PC for data processing and analysis software; pneumatic air supply system with pressure regulation; safety systems including emergency stop control and safety interlocks[1]
Performance2
Control & software5
Configuration & options13
- 10 A[1]
- Measurement Features:[1]
- Accurate thickness analysis[1]
- Non-contact sensor technology[1]
- Automated data collection[1]
- Real-time measurement display[1]
- Emergency stop functionality[1]
- Safety interlocks[1]
- System Components:[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage120 V[1]
- Configuration50/60 HZ[1]
- Main Air Pressure50 PSI[1]
- Stage Air Pressure5 Psi[1]
- ConfigurationPressure monitoring gauges[1]
- Frequency50/60 Hz[1]
- Control featuresPneumatic control system; emergency stop functionality; pressure monitoring gauges; user-friendly interface; safety interlocks[1]
- System componentsMain measurement unit with integrated controls; control panel with pneumatic controls, pressure gauges, and safety switches; dedicated PC for data processing and analysis software; pneumatic air supply system with pressure regulation; safety systems including emergency stop control and safety interlocks[1]
- Control PanelPneumatic controls with pressure gauges and safety switches[1]
- Pneumatic SystemAir supply system with pressure regulation[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of measurement does the UMSC 200 BT perform?
The UMSC 200 BT performs flatness and thickness measurement.[1][2][3][4]
What is the input voltage and frequency for the UMSC 200 BT?
The input voltage is 120 V and the frequency is 50/60 Hz.[1][2][3][4]
What are the air pressure requirements for the UMSC 200 BT?
Main air pressure is 50 PSI and stage air pressure is 5 PSI.[1][2][3][4]
What control features does the UMSC 200 BT include?
The UMSC 200 BT includes a pneumatic control system, emergency stop functionality, pressure monitoring gauges, a user-friendly interface, and safety interlocks.[1][2][3][4]
What are the main components of the UMSC 200 BT system?
The main components are a main measurement unit with integrated controls, a control panel with pneumatic controls and pressure gauges, a dedicated PC for data processing and analysis software, a pneumatic air supply system with pressure regulation, and safety systems including emergency stop control and safety interlocks.[1][2][3][4]
Not publicly documented
The following facts about the MicroSense UMSC 200 BT Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MicroSense UMSC 200 BT Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MicroSense UMSC 200 BT Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MicroSense UMSC 200 BT Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MicroSense UMSC 200 BT Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MicroSense UMSC 200 BT Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]KLA 2135 vs KLA MicroSense UMSC 200 BT Measurement comparison | Waferpedia — waferpedia.comwaferpedia.com
- [3]KLA MicroSense UMSC 200 BT Measurement vs KLA P 15 XP Surface comparison | Waferpedia — waferpedia.comwaferpedia.com
- [4]KLA AIT II Defect vs KLA MicroSense UMSC 200 BT Measurement comparison | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 26, 2026.
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