KLA
HRP 340 Surface
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Wafer size
8"
Optics
High Resolution Profiler[5]
What it is
The KLA HRP 340 Surface is a metrology and inspection tool in the HRP 340 family. The KLA HRP 340 Surface is a surface profilometer or high-resolution profiler used for wafer surface measurement.[1][4][5]
How it works
General reference — not yet source-verifiedA surface profilometer measures surface height by tracing a stylus across a wafer or other sample. A high-resolution profiler uses a stylus-based sensing stage to resolve fine topography changes on the surface.
Where it fits in the process flow
General reference — not yet source-verifiedThe KLA HRP 340 Surface fits in wafer metrology and inspection flow, where surface topography is checked after process steps that change film thickness or surface relief. A profiler of this class is typically used between fabrication steps to verify process results and monitor surface uniformity.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Bad load port
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the HRP 340 Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HRP 340 Surface are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the HRP 340 Surface are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the HRP 340 Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the HRP 340 Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the HRP 340 Surface are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]waferpedia.com — waferpedia.comwaferpedia.com
- [5]jenesisequipment.com — jenesisequipment.comjenesisequipment.com
Last updated Oct 4, 2026.
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