KLA
D600
The KLA Tencor D600 is a stylus surface profiler designed for advanced thin and thick film step height measurement. The D600 is compatible with 2", 4", 6", and 8" wafers. The D600 achieves a step-height repeatability of 5 angstroms.[1]
Plate 01Tencor D-600 Thin Film profiler
David InglisWatch on YouTube
Wafer size
2"
Performance
5A[1]
What it is
The KLA D600 is a stylus surface profiler manufactured by KLA Tencor (now KLA). The D600is designed for advanced thin and thick film step height measurement.[1]
How it works
General reference — not yet source-verifiedStylus surface profilers operate by dragging a diamond-tipped stylus across the sample surface. The stylus is in contact with the surface and its vertical displacement is measured as it traverses the step. The vertical movement is converted into an electrical signal via a transducer, producing a profilogram that shows the surface topography.
What can it run?
Process applications and technology nodes documented for this tool.
- Thin film step height measurement
- Thick film step height measurement
What do the numbers mean?
Wafer handling1
Performance3
Dimensions & facilities3
Configuration & options10
What replaced it?
Related models
- siblingKLA P-17— Listed in the same metrology equipment section.source[1]
- siblingBruker Dektak XT— Listed in the same metrology equipment section.source[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes are compatible with the KLA D600?
The D600 is compatible with 2-inch, 4-inch, 6-inch, and 8-inch wafers.[1]
What is the vertical range of the D600?
The vertical range is 1 mm.[1]
What is the step-height repeatability of the D600?
The step-height repeatability is 5 Å.[1]
What is the maximum scan length of the D600?
The scan length range is 55 mm with the stitching option.[1]
What is the force range of the stylus on the D600?
The force range is 0.03 to 15 mg.[1]
Not publicly documented
The following facts about the D600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the D600 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the D600 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the D600 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the D600 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the D600 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
Last updated Oct 8, 2026.
Compare with similar tools
View all →
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
