KLA
Alpha Step D 600 Stylus Profiler
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The Alpha-Step D-600 uses an optical lever sensor that converts vertical stylus displacement into a high-resolution electrical signal. The sensor provides a fast response to topography changes and enables a large vertical measurement range.[3]
A motorized XY stage moves the sample under the stylus. The stage supports a scan length of 55 mm and an XY travel of 150 x 178 mm. A manual stage leveling mechanism is provided. The optical lever sensor controls stylus force from 0.03 to 15 mg. A standard stylus has a 2 µm tip radius and a 60° cone angle. Side-view optics with keystone correction compensate for the viewing angle. An arc correction feature compensates for the natural arc motion of the stylus arm.[1][3]
Where it fits in the process flow
The Alpha-Step D-600 is designed for use in university research labs, government labs, pilot production lines, and R&D environments. The system supports automated measurement sequencing and can interface with statistical process control systems. Typical use cases include measuring etch depth, sputter height, post-CMP topography, and SIMS crater depth.[3]
Applications
The Alpha-Step D-600 supports 2D and 3D step height measurement across a range from nanometers to 1200 µm. The system measures surface roughness and waviness, thin-film stress using Stoney’s equation, and wafer bow and shape. Applications include semiconductor and compound semiconductor device fabrication, LED and solar cell production, MEMS manufacturing, and automotive and medical device inspection.[3][4]
Additional application areas include measuring SIMS crater depth, photoresist thickness, etch and deposition step heights, post-CMP topography, and printed circuit silver traces. The system is also used for textile security features and consumer electronics touch screen topography.[3]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Able to do scans, but the head is not working properly (not precise).
- The stylus does not have the expected freedom of movement.
What do the numbers mean?
Wafer handling2
Optics & imaging2
Control & software2
- Software features
- Advanced filtering, leveling, analysis; over forty surface parameters including slope, flatness, bearing ratio; extensive roughness parameters supporting ISO, ASME[3]
Dimensions & facilities3
Configuration & options5
- Issue
- Able to do scans, but the head is not working properly (not precise). The stylus does not have the expected freedom of movement[1]
- Industry applications
- Semiconductor, compound semiconductor, LED, solar, MEMS, automotive, medical devices, universities and research labs[3]
- Stylus options
- Variety of styli available; shares stylus design with P-Series and HRP Series[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Alpha Step D 600 Stylus Profiler are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alpha Step D 600 Stylus Profiler are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alpha Step D 600 Stylus Profiler are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alpha Step D 600 Stylus Profiler are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Alpha Step D 600 Stylus Profiler is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Alpha Step D 600 Stylus Profiler are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]kla.com — kla.comkla.com
- [3]kla.com — kla.comkla.com
- [4]KLA Alpha-Step D-600 Stylus Profiler Brochure Download | Unicorn — unicorn-tech.comunicorn-tech.com
Last updated Oct 7, 2026.
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