KLA
2820
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA 2820 is a brightfield wafer defect inspection system. The KLA 2820 is specified for 300 mm wafers.[1]
What it is
The KLA 2820 is a wafer inspection system in the metrology and inspection category.[2][3]
How it works
General reference — not yet source-verifiedWafer inspection systems examine wafer surfaces for defects and irregularities using optical inspection methods.
Brightfield inspection systems use reflected light and image analysis to detect surface defects on patterned wafers.
Where it fits in the process flow
General reference — not yet source-verifiedWafer inspection equipment is used in semiconductor manufacturing to check wafers during process control and defect monitoring.
The KLA 2820 supports inspection tasks that occur after wafer processing steps where surface quality and defectivity need verification.
Applications
What do the numbers mean?
Wafer handling1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the 2820 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the 2820 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2820 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2820 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2820 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2820 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]fabsurplus.com — fabsurplus.comfabsurplus.com
- [2]KLA-Tencor 2820 | SPS Global — semi-sps.comsemi-sps.com
- [3]2820 — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [4]Equipment inventory listing
- [5]Equipment inventory listing
Last updated Oct 4, 2026.
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