Waferpedia

KLA

2367 Brightfield

Metrology & InspectionKLA 2367 family
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2367 Brightfield — Inventory photo
Fig. 012367 BrightfieldInventory photo[1]

What it is

The KLA 2367 Brightfield is a brightfield inspection system in the metrology and inspection category.[2][3]

The KLA 2367 Brightfield is configured for 200 mm cassette handling and uses 208 V, 16 A, 50/60 Hz, three phase power.[1][2]

How it works

General reference — not yet source-verified

Brightfield inspection systems examine wafers by illuminating the surface and detecting contrast from defects against the surrounding pattern or film structure.

Metrology and inspection tools in this class support inline process control by measuring or detecting surface features on wafers rather than modifying the wafers.

Where it fits in the process flow

General reference — not yet source-verified

The KLA 2367 Brightfield fits in semiconductor inspection and metrology flows where wafers are checked for surface defects after process steps that can introduce particles, pattern issues, or film anomalies.

Applications

The KLA 2367 Brightfield is used for wafer defect inspection in semiconductor manufacturing.[4]

The KLA 2367 family serves metrology and inspection applications on wafer sizes in the 8-inch and 12-inch classes.[2]

What do the numbers mean?

Power & electrical1

Power Requirements
208 V, 16 A, 50 / 60 Hz, 3 Phase[1]
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Wafer handling3

25 cassette HW 200 mm[1]
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Wafer support
200 mm cassettes[1]
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Cassette HW
25 cassette HW 200 mm[1]
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Configuration & options11

CE Marked
Yes[1]
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ORS Upgrade[1]
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GEM/SECS and HSMS Model[1]
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Enable .12 , .62, .39 Picels[1]
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OEM
KLA[1]
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Model
2367 Brightfield[1]
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Category
Metrology & Inspection[2]
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Description
brightfield inspection system[2]
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Model support
GEM/SECS and HSMS[1]
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Pixels enabled
.12, .62, .39[1]
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Vintage
2017[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power Requirements208 V, 16 A, 50 / 60 Hz, 3 Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of tool is the KLA 2367 Brightfield?

The KLA 2367 Brightfield is a brightfield inspection system in the metrology and inspection category.[2][3]

What is the KLA 2367 Brightfield used for?

The KLA 2367 Brightfield is used as a wafer defect inspection system.[4]

Not publicly documented

The following facts about the 2367 Brightfield are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2367 Brightfield are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 2367 Brightfield are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 2367 Brightfield are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2367 Brightfield are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2367 Brightfield is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]2367 - Products - Precise System Ltd. — precise-sys.comprecise-sys.com
  4. [4]KLA 2367 Brightfield wafer defect inspection system for sale — fabsurplus.comfabsurplus.com
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Last updated Oct 4, 2026.

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