KLA
2138 Brightfield
What it is
General reference — not yet source-verifiedThe KLA 2138 Brightfield is a semiconductor wafer inspection system that uses brightfield optical microscopy to detect defects on wafer surfaces.
How it works
General reference — not yet source-verifiedBrightfield inspection illuminates the wafer surface with a broad-spectrum or laser light source and collects the reflected light through an optical microscope. Defects such as particles, scratches, or pattern anomalies scatter or absorb light, creating contrast in the captured image that is analyzed by digital image processing algorithms.
Applications
General reference — not yet source-verifiedThe system is applied to detect yield-relevant defects on all process layers, including front-end-of-line and back-end-of-line structures, for advanced semiconductor manufacturing.
What do the numbers mean?
Power & electrical3
- 50/60 Hz[1]
Wafer handling3
Control & software1
Configuration & options3
- 30 A[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 2138 Brightfield are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2138 Brightfield are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2138 Brightfield are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2138 Brightfield are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2138 Brightfield are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2138 Brightfield is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (10)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]fabsurplus.comfabsurplus.com
- [7]Equipment inventory listing
- [8]2138 Brightfield — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [9]KLA 2135 vs KLA 2138 Brightfield comparison | Waferpedia — waferpedia.comwaferpedia.com
- [10]KLA 2138 Brightfield vs KLA 2350 comparison | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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