KLA

2135 Brightfield

Metrology & Inspection KLA 21xx family

Research Quality: 40% complete

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The KLA 2135 is a brightfield inspection system manufactured by KLA.^[1]^[2]^[3]^[4]

2135 Brightfield — Inventory photo — Fig. 012135 BrightfieldInventory photo^[3]

What it is

The KLA 2135 is a brightfield inspection system manufactured by KLA.^[1]^[2]^[3]^[4]

How it works

General reference — not yet source-verified

Brightfield inspection tools illuminate the wafer surface with broad-spectrum light. The reflected or transmitted light is collected by an objective lens and projected onto a detector. Defects scatter or absorb light differently than the surrounding pattern, creating contrast in the image. The system detects these variations and classifies defect types based on size, shape, and location.

What do the numbers mean?

Power & electrical8

Voltage: 208 Vac^[3]; 50/60 Hz^[3]; 30 amps^[3]
Phase: 3 Phase^[4]
Frequency: 50/60 Hz^[3]
Current: 30 amps^[3]
Input Voltage: 208 Vac^[3]
Phase: Single-phase or three-phase^[4]

Configuration & options1

Refurbished^[2]

Accurate?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage208 Vac^[3]
Configuration50/60 Hz^[3]
Configuration30 amps^[3]
Phase3 Phase^[4]
Frequency50/60 Hz^[3]
Current30 amps^[3]
Input Voltage208 Vac^[3]
PhaseSingle-phase or three-phase^[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the power requirement for the KLA 2135?

The KLA 2135 can be configured for 208 Vac, 50/60 Hz, 30 amps, either single-phase or three-phase.^[3]^[4]

Not publicly documented

The following facts about the 2135 Brightfield are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2135 Brightfield are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2135 Brightfield are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2135 Brightfield are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2135 Brightfield are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2135 Brightfield is not on record.
Answerable by: an OEM datasheet or a fab qualification report