KLA

2132

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The KLA 2132 is a wafer inspection system produced by KLA for semiconductor manufacturing. The KLA 2132 is a patterned-wafer defect inspection tool. The KLA 2132 is configured for 8-inch (200 mm) wafers and can be modified to handle 6-inch or 4-inch wafers, with some configurations also capable of handling 5-inch wafers.^[1]^[2]^[3]

KLA2132

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Preceded by

First in line

This tool

2132

Succeeded by

2135

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What it is

The KLA 2132 is a wafer inspection system for semiconductor manufacturing.^[1]^[4]^[2]

The KLA 2132 is a patterned-wafer defect inspection tool in the KLA 213x inspection line.^[2]^[1]

How it works

The KLA 2132 uses brightfield, small-pixel, high-data-rate digital image processing to detect defects on patterned wafers.^[1]^[2]

The KLA 2132 supports Segmented Auto Threshold, and one configuration excludes the SAT option.^[2]^[4]

Where it fits in the process flow

The KLA 2132 is used for in-line monitoring during semiconductor manufacturing.^[1]^[2]^[3]

Applications

The KLA 2132 is used to detect yield-relevant defects on all process layers.^[1]

The KLA 2132 is used for patterned-wafer defect inspection.^[2]^[3]

The KLA 2132 supports monitoring of advanced processes.^[1]^[3]

In-line monitoring of advanced processes
Detection of yield-relevant defects on process layers

What do the numbers mean?

Wafer handling14

Product type: Wafer inspection system^[1]
Wafer size (primary): 200mm (8")^[2]
Wafer size (alternate): 4", 5", 6" capable^[2]
Throughput: 2–8 wafers per hour^[2]
Inspection type: Patterned wafer defect inspection^[2]
Calibration wafer: 8" DSW calibration wafer included^[2]
Product type: Patterned Wafer Defect Inspection Tool^[2]
Primary wafer size: 200 mm (8 in)^[2]
Capable wafer sizes: 100 mm (4 in), 125 mm (5 in), 150 mm (6 in)^[2]
Wafer size (primary): 200 mm (8-inch)^[4]
Wafer size (alternate): 6-inch or 4-inch; some configurations also 5-inch capable^[4]
Throughput: Approximately 2–8 wafers per hour^[2]; Inspection station; open cassette x2^[4]
Calibration wafer: 8-inch DSW calibration wafer included^[2]

Optics & imaging2

Optics: Brightfield, small-pixel, high data rate digital image processing^[1]2 sources
Optics / imaging: Brightfield, small-pixel, high-data-rate digital image processing^[1]

Control & software2

User interface: DOS operating system^[4]
User interface: DOS operation OS^[4]

Configuration & options8

Relationship to KLA 2135: Earlier model than the KLA 2135^[1]
Sensitivity: >0.25 µm pixels^[2]
SAT capability: Segmented Auto Threshold (SAT) included^[2]
Vintage (year of introduction): 1995^[2]
Vintage: 1995^[2]
Segmented Auto Threshold (SAT): Included^[2]
Sensitivity: Better than 0.25 µm pixels^[2]
SAT option: Included in some configurations; excluded in one listed configuration^[4]

Vintage & configurations

LineageSucceeded by 2135 All related models

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What replaced it?

successorKLA 2135— described as the earlier model, with the 2135 offering two- to three-times throughput improvementsource^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size is the KLA 2132 configured for?

The KLA 2132 is configured for 200 mm wafers.^[4]^[3]

What alternate wafer sizes can the KLA 2132 handle?

The KLA 2132 can be modified to handle 150 mm or 100 mm wafers, and some configurations are also capable of handling 125 mm wafers.^[4]^[3]

Not publicly documented

The following facts about the 2132 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2132 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2132 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2132 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2132 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2132 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]web.archive.org — web.archive.orgweb.archive.org
[2]gsemi.com — gsemi.comgsemi.com
[3]2132 — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[4]tbcl.com.tw — tbcl.com.twtbcl.com.tw