Waferpedia

Kensington

WFH 4 D Wafer Robot

LithographyKensington WFH family
Research Quality: 30% complete

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The Kensington WFH 4 D Wafer Robot is a lithography tool. The Kensington WFH 4 D Wafer Robot is a wafer robot with aligner. The Kensington WFH 4 D Wafer Robot is specified for 6-inch wafers.[1][2][3]

KensingtonWFH 4 D Wafer Robot
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What it is

The Kensington WFH 4 D Wafer Robot has an aligner configuration.[1][2][3]

How it works

General reference — not yet source-verified

A wafer robot transfers wafers between handling positions in a controlled semiconductor process environment.

A lithography wafer robot with an aligner positions and orients wafers before exposure or related alignment steps.

Where it fits in the process flow

The Kensington WFH 4 D Wafer Robot is used with six inch wafers.[1]

Applications

The Kensington WFH 4 D Wafer Robot is used for wafer handling in lithography-related processing.[3]

The Kensington WFH 4 D Wafer Robot is configured for six inch wafer processing.[1]

What do the numbers mean?

Wafer handling2

Description
wafer robot with aligner[2]
Accurate?
Wafer Sizes
6 inch[1]
Accurate?

Configuration & options4

with aligner[1]
Accurate?
Manufacturer
Kensington[1]
Accurate?
Model
WFH 4 D[1]
Accurate?
Version
150/200mm[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
WFH4D——Listed as the Kensington WFH4D wafer robot with aligner.fabsurplus.com[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is it?

The Kensington WFH 4 D is a wafer robot.[1][2][3]

Does it include an aligner?

The Kensington WFH 4 D Wafer Robot is configured with an aligner.[1][2][3]

Not publicly documented

The following facts about the WFH 4 D Wafer Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WFH 4 D Wafer Robot are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the WFH 4 D Wafer Robot are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WFH 4 D Wafer Robot are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WFH 4 D Wafer Robot is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the WFH 4 D Wafer Robot are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]fabsurplus.com — fabsurplus.comfabsurplus.com
  3. [3]WFH 4 D Wafer Robot — Kensington | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 8, 2026.

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