Hitachi
S 9360 CD-SEM
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Hitachi S 9360 is a critical-dimension scanning electron microscope (CD-SEM) manufactured by Hitachi. The S 9360 accepts wafers of 8 inch and 12 inch diameter.[1]
What do the numbers mean?
Wafer handling1
Dimensions & facilities1
Configuration & options1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What wafer sizes does the Hitachi S 9360 support?
The Hitachi S 9360 supports 8 inch and 12 inch wafer diameters.[1]
What type of equipment is the Hitachi S 9360?
The Hitachi S 9360 is a critical-dimension scanning electron microscope (CD-SEM) used for metrology and inspection.[1]
Who manufactured the Hitachi S 9360?
The Hitachi S 9360 was manufactured by Hitachi.[1]
Not publicly documented
The following facts about the S 9360 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9360 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 9360 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 9360 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 9360 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 9360 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Sep 28, 2026.
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