Hitachi
S 9300 CD-SEM
Wafer size
Wafer imaging ability; entire surface of 8” or 12” wafer
Power
500V to 1600V, 10V steps[1]
Optics
Electron Optical System:[1]
What it is
The Hitachi S 9300 CD-SEM is a critical dimension scanning electron microscope for metrology and inspection.[1][5]
How it works
The Hitachi S 9300 CD-SEM uses a Schottky emission source, an accelerating voltage of 500V to 1600V in 10V steps, a probe current of 4 to 24 pA with automated setting and measurement by Faraday cup, and a 3-stage electromagnetic lens system with boosting voltage.[1]
The Hitachi S 9300 CD-SEM includes a 2-stage electromagnetic deflection scan coil, astigmatism correction via an 8-pole electromagnetic coil, and a field control method that remains on for sample de-charging at all voltages.[1]
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical4
- Field control method ; Continuously on for sample de-charging, at all voltages[1]
Vacuum & pumping1
- Objective Lens
- 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum[1]
Wafer handling6
- 2 cassette holders with ergo flippers[1]
Optics & imaging7
Control & software1
Dimensions & facilities1
Configuration & options12
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Accelerating voltage500V to 1600V, 10V steps[1]
- Electromagnetic Lens3-Stage Electromagnetic Lens System with boosting voltage[1]
- Objective Lens4 opening click stop, heated aperture is selectable/adjustable outside the vacuum[1]
- ConfigurationField control method ; Continuously on for sample de-charging, at all voltages[1]
- Resolution3 nm (800V) Retarding/Boosting Mode[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What electron source does the Hitachi S 9300 CD-SEM use?
The Hitachi S 9300 CD-SEM uses a Schottky emission source.[1]
Not publicly documented
The following facts about the S 9300 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9300 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 9300 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 9300 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 9300 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 9300 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]waferpedia.com — waferpedia.comwaferpedia.com
- [6]Hitachi S-9300 CD-SEM | SemiStar — semistarcorp.comsemistarcorp.com
Last updated Oct 10, 2026.
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