Hitachi
S 5000 FE-SEM
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Hitachi S 5000 FE-SEM is a field emission scanning electron microscope. The Hitachi S 5000 FE-SEM is categorized under Metrology & Inspection. The Hitachi S 5000 FE-SEM is specified with ultra high resolution, a 30 kV accelerating voltage, and 500,000x magnification.[1][2][3]
What it is
The Hitachi S 5000 FE-SEM is a field emission scanning electron microscope that uses a cold field emission source. The instrument operates at accelerating voltages from 0.5 kV to 30 kV and provides magnifications up to 800,000 times in high-mag mode.[3]
How it works
The Hitachi S 5000 FE-SEM uses a cold field emission source and a three-stage electromagnetic lens system. The instrument has an octapole electromagnetic stigmator and a two-stage electromagnetic scanning coil.[3]
Applications
General reference — not yet source-verifiedFE-SEMs are applied in semiconductor process development, failure analysis, and quality control. The instruments provide high-resolution imaging of surface morphology and can be equipped with detectors for compositional analysis.
What do the numbers mean?
Power & electrical4
- Standard equipment
- Column, display unit, power supply, S-5080 camera, air compressor, rotary pumps, standard tool, spares and consumables, instruction manual, auto transformer[3]
Vacuum & pumping3
- Vacuum pumps
- IP1 60 l/s; IP2 20 l/s; IP3 20 l/s; TMP 340 l/s; RP 140 l/min (168 l/min) x 2 sets[3]
Optics & imaging3
Dimensions & facilities3
Configuration & options4
Vintage & configurations
- 1998Vintage stated[3]
A source lists the unit as 1998 vintage.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Accelerating voltage30 kV[3]
- Accelerating voltage range0.5 to 30 kV in 0.1 kV steps[3]
- Specimen exchangeAirlock type with prepumping[3]
- Vacuum pumpsIP1 60 l/s; IP2 20 l/s; IP3 20 l/s; TMP 340 l/s; RP 140 l/min (168 l/min) x 2 sets[3]
- Standard equipmentColumn, display unit, power supply, S-5080 camera, air compressor, rotary pumps, standard tool, spares and consumables, instruction manual, auto transformer[3]
- Dimensions and weight - power supply54(w) x 63(d) x 150(h) cm; 215 kg[3]
- Dimensions and weight - rotary pump54(w) x 22(d) x 41(h) cm; 32 kg x 2 sets[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the resolution of the Hitachi S 5000 FE-SEM at 30 kV?
0.6 nm at 30 kV in secondary electron image.[3]
What type of electron gun does the S 5000 FE-SEM use?
A cold field emission source.[3]
What is the maximum magnification of the S 5000 FE-SEM?
800,000 times in high-mag mode (x250 to x800,000).[3]
What specimen size can the standard holder of the S 5000 FE-SEM accommodate?
9.5 mm by 5 mm by 2.4 mm (height).[3]
Not publicly documented
The following facts about the S 5000 FE-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the S 5000 FE-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 5000 FE-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 5000 FE-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 5000 FE-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the S 5000 FE-SEM are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]S 5000 FE-SEM — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]semistarcorp.com — semistarcorp.comsemistarcorp.com
Last updated Sep 24, 2026.
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