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Hitachi

Kokusai DJ 1209 VC DMM

DepositionHitachi Kokusai family
Research Quality: 20% complete
Kokusai DJ 1209 VC DMM — Inventory photo
Fig. 01Kokusai DJ 1209 VC DMMInventory photo[1]

Power

440 VAC, 3 Phase[1]

Gas delivery

CVD (Chemical Vapor Deposition)[1]

What is it?

What do the numbers mean?

Power & electrical5

Voltage
440 VAC, 3 Phase[1]
Accurate?
Voltage
208 VAC, Single Phase[1]
Accurate?
Frequency
60 Hz[1]
Accurate?
Power
440 VAC, 3 Phase[1]
Accurate?
Power
208 VAC, Single Phase[1]
Accurate?

Gas & chemistry1

Process type
CVD (Chemical Vapor Deposition)[1]
Accurate?

Configuration & options1

No HDD & Quartz[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage440 VAC, 3 Phase[1]
  • Voltage208 VAC, Single Phase[1]
  • Frequency60 Hz[1]
  • Process typeCVD (Chemical Vapor Deposition)[1]
  • Power440 VAC, 3 Phase[1]
  • Power208 VAC, Single Phase[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What electrical power is required for the DJ 1209 VC DMM?

The tool requires 440 VAC three-phase and 208 VAC single-phase power at 60 Hz.[1][2]

Not publicly documented

The following facts about the Kokusai DJ 1209 VC DMM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kokusai DJ 1209 VC DMM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Kokusai DJ 1209 VC DMM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Kokusai DJ 1209 VC DMM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Kokusai DJ 1209 VC DMM are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Kokusai DJ 1209 VC DMM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Kokusai DJ 1209 VC DMM — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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