Hitachi
9220
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Hitachi 9220 is a semiconductor metrology and inspection tool family entry associated with a Hitachi CD-SEM configuration.[2][1]
The Hitachi S 9220 CD-SEM is a critical dimension scanning electron microscope used for length measurement of semiconductor features.[1]
How it works
The Hitachi S 9220 CD-SEM uses an electromagnetic lens system with a booster stock lens and a scintillator-photomultiplier detector with an EXB filter for two-stage detection of secondary and backscattered electrons.[1]
The Hitachi S 9220 CD-SEM uses a pulse motor drive stage with linear encoder positioning, automatic wafer transfer, and vacuum suction chucking on the back side of the wafer.[1]
Where it fits in the process flow
The Hitachi S 9220 CD-SEM is used to measure semiconductor features and to evaluate wafer-level pattern dimensions during manufacturing control.[1]
Applications
The Hitachi S 9220 CD-SEM is applied to length measurement of semiconductor features, with a measuring range of 0.1 μm to 2.0 μm and a secondary electron image resolution of 3 nm at an acceleration voltage of 0.8 kV.[1]
What do the numbers mean?
Power & electrical5
Wafer handling2
Optics & imaging4
- Detection System
- Scintillator / photomultiplier detector using EXB filter; 2 stage detection method for SE and BSE images[1]
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Secondary Electron Image Resolution3 nm at acceleration voltage 0.8 kV[1]
- Acceleration Voltage500 to 1600 V (variable in 10 V steps)[1]
- Power Supply (208V variant)208 V, 60 Hz, Single Phase[1]
- Power Supply (100V variant)100V, 60 Hz, Single Phase, 6kVA[1]
- Power Supply (200V variant)200V, 60 Hz, Single Phase[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of tool is the Hitachi S 9220 CD-SEM?
The Hitachi S 9220 CD-SEM is a critical dimension scanning electron microscope used for length measurement of semiconductor features.[1]
What is the measuring range of the Hitachi S 9220 CD-SEM?
The Hitachi S 9220 CD-SEM has a measuring range of 0.1 μm to 2.0 μm.[1]
What is the secondary electron image resolution of the Hitachi S 9220 CD-SEM?
The Hitachi S 9220 CD-SEM achieves a secondary electron image resolution of 3 nm at an acceleration voltage of 0.8 kV.[1]
What is the throughput of the Hitachi S 9220 CD-SEM?
The Hitachi S 9220 CD-SEM has a throughput of 56 wafers per hour in continuous measurement mode.[1]
How does the Hitachi S 9220 CD-SEM handle wafers?
The Hitachi S 9220 CD-SEM uses an automatic wafer transfer robot with random access for two cassettes and vacuum suction chucking on the back side of the wafer.[1]
Not publicly documented
The following facts about the 9220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9220 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 9220 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 9220 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 9220 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 9220 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]S 9220 — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]Equipment inventory listing
Last updated Sep 28, 2026.