Denton Vacuum
SJ20C
The Denton SJ20C is an e-beam evaporation deposition tool. The Denton SJ20C is used for physical vapor deposition. The Denton SJ20C has four crucible pockets.[1][2]
What it is
How it works
E-beam evaporation is a form of physical vapor deposition that uses a high-energy beam to heat material in a vacuum chamber, and the material then condenses on a substrate as a thin film.[1]
The Denton SJ20C uses a crystal monitor and a deposition controller to support process control during evaporation.[1][2]
Deposition on this tool uses a chamber, a sample holder, crucibles, target materials, and beam control as part of the evaporation sequence.[2]
Where it fits in the process flow
The tool is used after a sample is mounted and the chamber is prepared, and it is followed by handling, cooling, and subsequent process steps after deposition.[2]
Applications
The Denton SJ20C is used for depositing metals and other vacuum-evaporated materials onto substrates.[1]
The tool supports deposition of Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, Ti, and W.[1]
The tool is suited to thin films for optical coatings, semiconductor manufacturing, and other temperature-resistant coating uses associated with e-beam evaporation.[1]
- Thin-film deposition
- E-beam evaporation
What do the numbers mean?
Control & software2
- Deposition controller settings
- Density and Z-Ratio are programmed for the material to be deposited[2]
Configuration & options9
- Evaporation materials available
- Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, Ti, W[1]
What replaced it?
Related models
- siblingDenton Vacuum 635— Listed on the same equipment page under deposition alongside Denton 635.source[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What maintenance is typically required for a PVD deposition system?General reference — not yet source-verified
Regular maintenance includes cleaning the chamber walls to remove built-up film deposits, replacing sputtering targets or evaporation sources, calibrating vacuum gauges and deposition monitors, and servicing pumps and seals. For systems with load locks, the transfer mechanism also requires periodic inspection and lubrication.
Not publicly documented
The following facts about the SJ20C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SJ20C are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SJ20C are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SJ20C are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SJ20C are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SJ20C is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
- [2]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
- [3]Equipment Page | Utah Nanofab — nanofab.utah.edunanofab.utah.edu
Last updated Oct 4, 2026.
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